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As a leading supplier of sensors, measuring systems, laser markers, microscopes, and machine vision systems worldwide, KEYENCE is at the forefront of factory automation. They strive to develop innovative and reliable products to meet the needs of our customers in every manufacturing industry.

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Controller switch

$0~$10(0)
$10~$25(0)
$25~$50(0)
$50~$75(2)
$75~$100(2)
$100~$200(10)
$200~$300(8)
$300~$400(19)
$400~$500(6)
$500~$750(16)
$750~$1000(24)
$1000~$5000(110)
$5000~$10000(40)
$10000~$50000(70)
$50000~$100000(2)
$100000~$3000000(1)

? rotation angle

360 Degrees

±90 Degrees

Ambient temperature

+15 to 28 Degrees C 59 to 82.4 Degrees F

+5 to 40 Degrees C +41 to 104 Degrees F

0 to +40 Degrees C 32 to 104 Degrees F

+15 to 35 Degrees C 59 to 95 Degrees F

+10 to +80 Degrees C 50 to 176 Degrees F

+5 to +40 Degrees C 41 to 104 Degrees F

Ambient humidity range

20 to 80% RH (no condensation)

Ambient temperature range

+ 15 to + 30 Degrees C +59 to + 86 Degrees F

Applicable product

VH-Z20UR/Z20UW

OP-87270/VH-Z20UR/Z20UW

OP-87270

VH-Z20UR/Z20UW, VH-Z100R/W, VH-Z100UR/W

VR-3050, VR-3100

Automatic XY combined measurement range, High magnification (3 × 1 composition)

VL-550: W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Automatic XY combined measurement range Low magnification (3 × 1 composition)

W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

Automatic XY combined measurement range High magnification (3 × 1 composition)

W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Automatic XY combined measurement range Low magnification (2 × 2 composition)

ø500 x H 200 mm ø19.69" x H 7.87"

Auto exposure method

User-specified area, average/peak

Automatic rotation combined measurements Stitching Functions

Yes

Applicable OS

Windows®10 Pro 64 bit

Built-In Light Source Type

High-intensity LED

BZ-H4A/Advanced Analysis Software

Image stitching, Haze reduction, Full focus

BZ-H4R/3D Application

3D display, 3D measurement, XYZ slicing, Maximum projection, Video saving, (with addition of BZ-H4C) 3D cell count

BZ-H4XD/Advanced Observation Module

Navigation, Image stitching, Z-stack, Coordinate-specific condition setting

Automatic XY combined measurement range High magnification (2 × 2 composition)

ø110 x H 50 mm ø4.33" x H 1.97"

Basic optical system

Inverted fluorescence phase contrast microscope

Automatic rotation combined measurements Stitching Function

Yes

Automatic XY combined measurement range, Low magnification (3 × 1 composition)

VL-550: W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

BZ-H4K/Motion Analysis Application

Motion tracking, Motion analysis, (with addition of BZ-H4C) Time-series cell count

BZ-H4M/Measurement Application

Dimension measurement, Area measurement, Brightness measurement (line profile, histogram)

BZ-H4XT/Time-lapse Module

Time-lapse imaging, Video capturing, Time-series brightness measurement

Automatic XY combined measurement range, High magnification (2 × 2 composition)

VL-550: ø110 x H 50 mm ø4.33" x H 1.97"

Automatic XY combined measurements

VL-550: Yes

Binning

On-chip binning (2 x 2, 3 x 3, 4 x 4, 8 x 8, 12 x 12)

BZ-H4XI/Image Cytometer Module

Batch capture (user location specified/all locations specified/random location specified) *BZ-H4XD required/Image cytometer analysis, batch analysis *BZ-H4C required

BZ-H4CM/Macro Cell Count

Macro cell count (Batch analysis of multiple images)

Borescope lens zoom attachment

VH-BA

Built-In Light Source Service life

40 thousand hours (reference value)

BZ-H4C/Hybrid Cell Count

Cell count (Phase contrast, Brightfield, Fluorescence) , Mask cell count

BZ-H4XF/Sectioning Module

Optical sectioning image mode

Automatic rotation combined measurements

Yes

Automatic XY combined measurement range, Low magnification (2 × 2 composition)

VL-550: ø500 x H 200 mm ø19.69" x H 7.87"

Back-focus adjustment

Not required

Bendable sleeve angle

VH-F61 : 120 Degrees (up and down) , VH-F111 : 120 Degrees (up and down), 100 Degrees (right and left)

CCD cooling mechanism

Peltier cooling: 5 Degrees C 41 Degrees F (Reduction amount: 25 Degrees C 45 Degrees F)

Controller

VL-500

Depth of field

Approx.2.7 µm

Approx.33 µm

Approx.6.1 µm

Approx.55 µm

Depth of Field, 100 x

1.6 mm 0.06"

Depth of Field, 200 x

0.44 mm 0.02"

Diagonal Field of View, 20x

19050 µm

19.05 mm 0.75"

Diagonal Field of View, 500x

0.76 mm 0.03"

762 µm

760 µm

Diagonal Field of View, 50x

7.62 mm 0.30"

Dichroic mirror wavelength

495 nm

585 nm

400 nm

660 nm

565 nm

425 nm

Electronic shutter

Auto; 1/7500 to 60 sec. (77 increments)

Auto, Manual, 1/30, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000

Auto, Manual, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000

Emission wavelength

460/50 nm

605/70 nm

630/75 nm

700/75 nm

525/50 nm

Controller Dimensions

Controller: 227.5 (H) x 125 (W) x 403 mm (D) 8.96 " (H) x 4.92 " (W) x 15.87 " (D)

Field of view

1449x1091 µm

3623x2728 µm

11 to 7398 µm

725x546 µm

7247x5456 µm

Focus variation Width display resolution, VK-X3050

1 nm

Controller Weight

3.8 kg 8.38 lb

Depth of Field, 20 x

34 mm 1.34"

Depth of Field, 50 x

6.0 mm 0.24"

Depth of Field, 30 x

15.5 mm 0.61"

Control PC

Dedicated PC specified by KEYENCE (OS: Windows 10)

Diagonal Field of View, 0.1 x

4000 mm 157.5"

Diagonal Field of View, 0.5 x

800 mm 31.5"

Diagonal Field of View, 1000x

381 µm

0.38 mm 0.01"

380 µm

Diagonal Field of View, 100x

3810 µm

3.81 mm 0.15"

Diagonal Field of View, 150 x

2.54 mm 0.10"

Diagonal Field of View, 1500x

0.25 mm 0.009"

Diagonal Field of View, 200 x

1.90 mm 0.07"

1.91 mm 0.08"

Diagonal Field of View, 400x

0.95 mm 0.04"

Diagonal Image Capture Range, 5000x

0.08 mm 0.0031"

Diagonal Image Capture Range, 50x

7.62 mm 0.300"

Diagonal Field of View, 30 x

12.7 mm 0.5"

12.70 mm 0.50"

Diagonal Image Capture Range, 20x

19.05 mm 0.750"

Diagonal Image Capture Range, 6000x

0.06 mm 0.0024"

Diagonal Field of View, 160x

2.38 mm 0.09"

Diagonal Field of View, 300 x

1.27 mm 0.05"

Diagonal Field of View, 5 x

76.2 mm 3"

Diagonal Image Capture Range, 500x

0.76 mm 0.0299"

0.76 mm 0.030"

Diagonal Field of View, 10 x

38.1 mm 1.5"

Diagonal Image Capture Range, 700x

0.54 mm 0.0213"

Diagonal Field of View, 140x

2.72 mm 0.11"

Diagonal Field of View, 2000x

191 µm

0.19 mm 0.007"

190 µm

Diagonal Field of View, 60x

6.35 mm 0.25"

Diagonal Image Capture Range, 1000x

3.81 mm 0.150"

0.38 mm 0.0150"

Diagonal Image Capture Range, 1500x

0.25 mm 0.0098"

Diagonal Image Capture Range, 30x

12.7 mm 0.500"

Diagonal Image Capture Range, 40x

9.53 mm 0.375"

Diagonal Field of View, 1 x

400 mm 15.75"

Diagonal Field of View, 180x

2.12 mm 0.08"

Diagonal Field of View, 2500x

0.15 mm 0.005"

Diagonal Field of View, 3000x

127 µm

Diagonal Field of View, 300x

1.27 mm 0.05"

Diagonal Field of View, 50 x

7.6 mm 0.30"

7.62 mm 0.30"

Diagonal Image Capture Range, 2000x

0.19 mm 0.0075"

Diagonal Image Capture Range, 300x

1.27 mm 0.050"

Diagonal Image Capture Range, 80x

4.76 mm 0.187"

Dimensions

VH-F61 : ø6.1 mm0.24",VH-F111 : ø11 mm 0.433"

Diagonal Field of View, 200x

1910 µm

1.90 mm 0.07"

1.91 mm 0.08"

Diagonal Field of View, 500 x

0.76 mm 0.03"

Diagonal Field of View, 80x

4.76 mm 0.19"

Diagonal Image Capture Range, 100x

3.81 mm 0.150"

Effective length

VH-F61 : 1000 mm 39.37" , VH-F111 : 1500 mm 59.06"

141.5 mm 5.57"

185.3 mm 7.30"

276 mm 10.87"

95 mm 3.74"

Diagonal Field of View, 1000 x

0.38 mm 0.01"

Diagonal Field of View, 40x

9.53 mm 0.38"

Diagonal Field of View, 5000x

76 µm

Diagonal Field of View, 700 x

0.54 mm 0.02"

Focus variation Height display resolution

1 nm

0.1 nm

Focus variation Width display resolution, VK-X3100

0.1 nm

Fluorescent incident illumination

Optical sectioning system

Focus variation Height accuracy

0.2+L/ 100 µm or less

Diagonal Field of View, 120x

3.18 mm 0.13"

Diagonal Field of View, 20 x

19.05 mm 0.75"

Diagonal Field of View, 250x

1.52 mm 0.06"

Diagonal Image Capture Range, 2500x

0.15 mm 0.0059"

Diagonal Image Capture Range, 4000x

0.1 mm 0.0039"

Diagonal Image Capture Range, 400x

0.95 mm 0.037"

Display resolution

0.1 µm 0.000004"

0.1 µm

Excitation wavelength

560/40 nm

620/60 nm

360/40 nm

545/25 nm

470/40 nm

395/25 nm

Fluorescence dimming mechanism

Electronic dimming (0.3 %, 5 %, 10 %, 20 %, 40 %, 100 %)

Fine mode (16M Mode) Measurement resolution, VL-550

VL-550: 16 million points

Focus variation Width repeatability 3s

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 50 nm

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 65 nm

Focus variation Width display resolution

0.1 nm

1 nm

Focus variation Height repeatability s

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 20 nm

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 30 nm

Focus variation Height repeatability s, VK-X3050

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 30 nm

Focus variation Width repeatability 3s, VK-X3100

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 50 nm

Fine mode Measurement resolution (16M Mode)

16 million points

Focus variation Height display resolution, VK-X3100

0.1 nm

Focus variation Width repeatability 3s, VK-X3050

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 65 nm

Diagonal Field of View, 100 x

3.81 mm 0.15"

Diagonal Image Capture Range, 200x

1.91 mm 0.075"

Depth of Field, 150 x

0.74 mm 0.03"

Fast Resolution

2048 (H) x 1536 (V)

Diagonal Image Capture Range, 150x

2.54 mm 0.100"

Gain

Manual, Preset

0 dB, +6 dB, +12 dB, +18 dB

Frame rate

30 F/S (max.)

50 F/S (max.)

15 fps for monochrome recording (up to 95 fps with binning) , 8.5 fps for color recording

Focus variation Height display resolution, VK-X3050

1 nm

Focus variation Width accuracy

Measured value ±2% or less

High accuracy Resolution

12,000 (H) x 9000 (V)

6144 (H) x 4608 (V)

Fluorescent light source

80 W metal halide lamp

Focus variation Height repeatability s, VK-X3100

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 20 nm

Horizontal Field of View, 1000 x

0.30 mm 0.01"

Horizontal Field of View, 1000x

305 µm

300 µm

0.31 mm 0.01"

Horizontal Field of View, 120x

2.54 mm 0.10"

Horizontal Field of View, 700 x

0.44 mm 0.02"

Horizontal Image Capture Range, 1500x

0.20 mm 0.0079"

Horizontal Image Capture Range, 2000x

0.16 mm 0.0063"

Horizontal Image Capture Range, 5000x

0.06 mm 0.0024"

Horizontal Image Capture Range, 700x

0.44 mm 0.0173"

High dynamic range

16-bit intensity range through RGB data from each pixel

High magnification Measurement range

ø70 x H 50 mm ø2.76" x H 1.97"

Horizontal Field of View, 1 x

320 mm 12.6"

Horizontal Field of View, 200x

1.52 mm 0.06"

1520 µm

1.53 mm 0.06"

Horizontal Field of View, 250x

1.22 mm 0.05"

Horizontal Field of View, 400x

0.76 mm 0.03"

Horizontal Field of View, 50 x

6.1 mm 0.24"

6.10 mm 0.24"

Image element

1/1.7-inch, 12.22-megapixel CMOS image sensor

Image receiving element

1/1.8 inch, 3.19 megapixel CMOS image sensor

2/3 inch, 2.83 million pixel monochrome CCD (colorized with LC filter)

Horizontal Field of View, 100x

3050 µm

3.05 mm 0.12"

Horizontal Field of View, 200 x

1.52 mm 0.06"

1.53 mm 0.06"

Horizontal Image Capture Range, 500x

0.61 mm 0.024"

0.61 mm 0.0240"

Horizontal Image Capture Range, 6000x

0.05 mm 0.0020"

Horizontal Field of View, 160x

1.91 mm 0.08"

Horizontal Field of View, 20x

15.24 mm 0.60"

15240 µm

Horizontal Field of View, 60x

5.08 mm 0.20"

Horizontal Image Capture Range, 150x

2.03 mm 0.080"

Horizontal Image Capture Range, 2500x

0.12 mm 0.0047"

Horizontal Image Capture Range, 4000x

0.08 mm 0.0031"

Horizontal Image Capture Range, 400x

0.76 mm 0.030"

Horizontal Image Capture Range, 40x

7.62 mm 0.300"

Horizontal Field of View, 0.1 x

3200 mm 126"

Horizontal Field of View, 30 x

10.2 mm 0.40"

10.16 mm 0.40"

Horizontal Image Capture Range, 200x

1.52 mm 0.060"

Head Dimensions

Head: 517 (H) x 340 (W) x 496 mm (D) 20.35 " (H) x 13.39 " (W) x 19.53 " (D)

Horizontal Image Capture Range, 20x

15.24 mm 0.600"

Horizontal Field of View, 180x

1.69 mm 0.07"

Horizontal Field of View, 20 x

15.24 mm 0.60"

Horizontal Field of View, 500 x

0.61 mm 0.02"

Horizontal Field of View, 80x

3.81 mm 0.15"

Horizontal Image Capture Range, 1000x

3.05 mm 0.120"

0.31 mm 0.0122"

Horizontal Field of View, 3000x

102 µm

Horizontal Image Capture Range, 80x

3.81 mm 0.150"

Image-formation optical system

Fixed image-forming lens, electronic LC filter insertion/removal mechanism

High magnification (2 × 2 composition)

VL-550: ø110 x H 50 mm ø4.33" x H 1.97"

Horizontal Field of View, 2000x

152 µm

0.15 mm 0.005"

150 µm

Horizontal Image Capture Range, 50x

6.10 mm 0.240"

High magnification (3 × 1 composition)

VL-550: W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Horizontal Field of View, 100 x

3.05 mm 0.12"

Horizontal Field of View, 5000x

61 µm

Horizontal Field of View, 500x

610 µm

0.61 mm 0.02"

Horizontal Field of View, 50x

6.09 mm 0.24"

Horizontal Image Capture Range, 30x

10.16 mm 0.400"

High-resolution

2880 (H) x 2160 (V) (4K Mode OFF), 4000 (H) x 3000 (V) (4K Mode ON)

Horizontal Field of View, 10 x

30.5 mm 1.20"

Horizontal Field of View, 140x

2.18 mm 0.09"

Horizontal Field of View, 1500x

0.2 mm 0.01"

Horizontal Field of View, 300 x

1.02 mm 0.04"

Horizontal Field of View, 300x

1.02 mm 0.04"

Horizontal Image Capture Range, 300x

1.02 mm 0.040"

Horizontal Field of View, 0.5 x

640 mm 25.2"

Horizontal Field of View, 150 x

2.03 mm 0.08"

Horizontal Field of View, 2500x

0.12 mm 0.004"

Horizontal Field of View, 40x

7.62 mm 0.30"

Horizontal Field of View, 5 x

61 mm 2.40"

Horizontal Image Capture Range, 100x

3.05 mm 0.120"

Laser confocal Height accuracy

0.2+L/ 100 µm or less

Load capacity

20 kg 44.09 lb

5 kg

3 kg

50 kg 110.23 lb

1 kg

Low magnification (3 × 1 composition)

VL-550: W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

Magnification

20 x, 40 x, 60 x, 80 x, 100 x, 120 x, 140 x, 160 x, 180 x, 200 x

50 x, 100 x, 200 x, 300 x, 400 x, 500 x

20 x, 30 x, 50 x, 100 x, 150 x, 200 x

2500x, 4000x, 5000x, 6000x

100 x, 200 x, 300 x, 500 x, 700 x, 1000 x

20x, 30x, 40x, 50x, 80x, 100x

500 x, 1000 x, 2000 x, 3000 x, 5000 x

0.1 x, 0.5 x, 1 x, 5 x, 10 x, 30 x, 50 x

250 x, 300 x, 500 x, 1000 x, 1500 x, 2000 x, 2500 x

20 x, 100 x, 200 x, 500 x, 1000 x, 2000 x

100x, 150x, 200x, 300x, 400x, 500x

500x, 700x, 1000x, 1500x, 2000x, 2500x

Laser confocal Height display resolution, VK-X3050

1 nm

Load capacity VL-530

VL-530: 20 kg 44.09 lb

Low magnification (2 × 2 composition)

VL-550: ø500 x H 200 mm ø19.69" x H 7.87"

Laser confocal Height repeatability s, VK-X3050

10x: 100 nm, 20x: 40 nm, 50x: 20 nm

Measurement range High magnification

ø70 x H 50 mm ø2.76" x H 1.97"

Measurement accuracy

±10 µm 0.0004"

Laser confocal Width repeatability 3s, VK-X3100

10x: 200 nm, 20x: 100 nm, 50x: 40 nm

Load capacity VL-550

VL-550: 50 kg 110.23 lb

Load capacity, VL-550

VL-550: 50 kg 110.23 lb

Laser class

Class 2 (IEC60825-1, FDA (CDRH) Part 1040.10)

Laser confocal Height display resolution

1 nm

0.1 nm

Laser confocal Height repeatability s

10x: 100 nm, 20x: 40 nm, 50x: 12 nm

10x: 100 nm, 20x: 40 nm, 50x: 20 nm

Laser confocal Width accuracy

Measured value ±2% or less

Laser confocal Width display resolution

1 nm

0.1 nm

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz

Maximum observation magnification

140x

360x

150x

135x

125x

Motorized: Operating range

100 x 100 mm 3.94” x 3.94”

100 mm x 100 mm 3.94" x 3.94"

Minimum view range

2 mm 0.08"

2.4 mm 0.09"

2.2 mm 0.09"

0.8 mm 0.03"

Low magnification Measurement range

ø300 x H 200 mm ø11.81" x H 7.87"

Outer diameter When the borescope lens alone/With the Guard tube installed

ø1.8 (ø2.0) mm ø0.07" (ø0.08")

ø2.7 (ø3.0) mm ø0.11" (ø0.12")

ø4.0 mm ø0.16"

ø5.5 mm ø0.22"

ø10.0 mm ø0.39"

Measurement resolution Standard mode (4M Mode)

4 million points

Power consumption, VL-530

VL-530: Controller/Measurement unit: 200 VA, Stage: 200 VA

Power voltage

100 to 240 VAC, 50/60 Hz

12V DC 2.5 A

DC 12 V

100 to 240 VAC ±10%, 50/60 Hz

Movement accuracy

4 + 0.02L (µm)

Manual operation range

70 x 70 mm 2.76” x 2.76”

Laser confocal Width repeatability 3s

10x: 200 nm, 20x: 100 nm, 50x: 40 nm

10x: 400 nm, 20x: 100 nm, 50x: 50 nm

Laser wavelength

Semiconductor laser, 661 nm

Semiconductor laser, 404 nm

Laser wavelength, VK-X3050

Semiconductor laser, 661 nm

Max. laser output

0.9 mW

Laser light-receiving element

16-bit photomultiplier

Laser wavelength, VK-X3100

Semiconductor laser, 404 nm

Laser confocal Height display resolution, VK-X3100

0.1 nm

Light blocking curtain Weight

5.5 kg 12.13 lb (VL-550), 3.6 kg 7.94 lb (VL-530)

3.6 kg 7.94 lb

5.5 kg 12.13 lb

Measurement range Low magnification

ø300 x H 200 mm ø11.81" x H 7.87"

Optical observation; Optical zoom

1 to 8x

Optical observation; Revolver

6-hole electric revolver

Load capacity, VL-530

VL-530: 20 kg 44.09 lb

Laser confocal Height repeatability s, VK-X3100

10x: 100 nm, 20x: 40 nm, 50x: 12 nm

Laser confocal Width repeatability 3s, VK-X3050

10x: 400 nm, 20x: 100 nm, 50x: 50 nm

Outer diameter When the Lateral view tube is installed

ø3.0 mm 0.118"

ø4.4 mm 0.173"

ø5.9 mm 0.232"

ø10.5 mm 0.413"

ø2.0 mm 0.079"

Measurement light source

Blue LED

Measurement resolution Fine mode (16M Mode)

VL-550: 16 million points

Motorized filter turret

Up to four filters can be mounted. Automatic position recognition and automatic excitation shutdown during filter replacement

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Slide thickness

1.2

0 to 2

Motorized operation range

100 x 100 mm 3.94” x 3.94”

Motorized XY stage

114 x 80 mm 4.49 " x 3.15 " stroke, minimum 1 µm pitch min.

Observation modes

Brightfield, Fluorescence (wide-field/sectioning) , Phase contrast (PhL, Ph1, Ph2) , Oblique illumination

Optical observation; Ring illumination lens

2.5x, 5x, 10x

Motor

5-phase stepping motor

0.13

0.45

0.3

0.1

Output signal, gradations

14-bit/8-bit monochrome, 8-bit R/G/B

Power consumption

130 VA

50 VA

70 VA

250 VA

150 VA

30 VA

18 VA

Controller/Measurement unit: 200 VA

Power consumption VL-530: Controller/Measurement unit:

200 VA, Stage: 200 VA

Specimen enclosure

The stage is fully contained in a built-in darkroom

Stage movement range

ø200 mm ø7.87"

VL-550: ø200 mm ø7.87"

Stage Power Supply

80 VA

200 VA

Standard mode (4M Mode) Measurement resolution

4 million points

Supercharge shutter

Can be set in 0.01 s increments from 0.02 to 16 s

Can be set in 0.01 s increments from 0.03 to 4 s

Observation distance

1 mm 0.0394"

6.3 mm 0.2480"

24 mm 0.945"

30 mm 1.181" (22.9 mm 0.902")

Observation light source

LEDs in 3 colors (red, green, blue)

Observation software

Multi-color image capturing, Auto focus, Quick full-focusing, Scale display, Electronic revolver control, Electronic stage control

Optical observation; Number of pixels

5.6 million

Optical receiver system

Low/high magnification offset dual optical module

Overvoltage category

PC interface

USB2.0

Positioning accuracy

6 µm

Power consumption, VL-550

VL-550: Controller/Measurement unit: 200 VA, Stage: 80 VA

Oil & waterproof

Machine oil and light oil

Number of pixels in recorded image

4,080 x 3,060 max (12.5 megapixel, high-quality interpolation)

Laser confocal Width display resolution, VK-X3050

1 nm

Pollution degree

Power consumption VL-550: Controller/Measurement unit:

200 VA, Stage: 80 VA

Power supply

100 to 240 VAC ±10 %, 50/60 Hz

Repeatability (s)

2 µm 0.000079"

Relative humidity

35 to 80 % RH (No condensation)

35 to 80% RH (no condensation)

20 to 80% RH (No condensation)

Scanning system

Progressive

Total Pixels

Total pixels: 2064 (H) x 1554 (V); virtual pixels: 2048 (H) x 1536 (V)

4168 (H) x 3062 (V); virtual pixels: 4024 (H) x 3036 (V)

Type

Real bore zoom attachment

Stage

Anti-vibration, high-magnification observation system

Diffuse Illumination Adapter

Measurement head

Triple Light Base Unit

Controller

Borescope lens

Lens attachment

Tilt stage

Wide Area Illumination Adapter

Measurement unit

Variable illumination adapter

Z stage

Vertical Field of View, 1000 x

0.23 mm 0.01"

Vertical Field of View, 150 x

1.52 mm 0.06"

Vertical Field of View, 1500x

0.15 mm 0.005"

Vertical Field of View, 50 x

4.56 mm 0.18"

4.6 mm 0.18"

Vertical Field of View, 500x

0.46 mm 0.02"

457 µm

460 µm

Vertical Field of View, 50x

4.57 mm 0.18"

Vertical Image Capture Range, 1000x

2.28 mm 0.090"

0.23 mm 0.0091"

Vertical Image Capture Range, 1500x

0.15 mm 0.0059"

View angle

35 Degrees

VH-F61 : 65 Degrees, VH-F111 : 55 Degrees

32 Degrees

30 Degrees

Laser confocal Width display resolution, VK-X3100

0.1 nm

Measurement Unit Weight

18.5 kg 40.79 lb

White light source

White LED

Repeatability

±0.5 µm

Z motorized stage resolution

1 µm (typical)

0.1 µm (typ.)

0.1 µm (typical)

Z motorized/manual stage

Motorized

Z stage movement amount

49 mm 1.93"

Side camera

Yes, VGA

Revolver

6-hole electric revolver

Measurement unit

VL-570

Stage configuration, VL-530

Motorized theta stage mechanism

VL-530: Motorized theta stage mechanism

Standard Resolution

2880 (H) x 2160 (V)

2048 (H) x 1536 (V)

Objective lens switching

Six-mount electronic revolver

Operating atmospheric pressure

1 atm

Stage stroke distance

100 mm 3.94" in the X and Y directions, respectively

15 mm 0.59"

Stage Weight

25.4 kg 56.00 lb

26 kg 57.32 lb (VL-550), 25.4 kg 56.00 lb (VL-530)

26 kg 57.32 lb

Standard mode Measurement resolution (4M Mode)

4 million points

Spectral interference film thickness measurement Accuracy

±0.6%

Stage configuration

Motorized XY theta stage mechanism

Motorized theta stage mechanism

Stage configuration, VL-550

Motorized XY theta stage mechanism

VL-550: Motorized XY theta stage mechanism

Stage

VL-550,VL-530

Supported lenses

VH-B18, VH-B27, VH-B40, VH-B55, VH-B100

Number of pixels

5.6 million

Objective lenses

Nikon CFI60 Series infinite optical system

Optical transmitter system

Offset transmission-type projector module

Resolution

0.05 µm/pulse

Motorized Z stage

8 mm 0.31 " stroke, minimum 0.1 µm pitch min.

Observation depth

VH-F61 : 10 mm to 80.39" to 8 , VH-F111 : 20 mm to 80.79" to 8

Optical zoom

1 to 8x

Ring illumination lens

2.5x, 5x, 10x

Transmitted light source

3.7 W LED

Vertical Field of View, 10 x

22.8 mm 0.80"

Vertical Field of View, 120x

1.90 mm 0.07"

Vertical Field of View, 2000x

0.11 mm 0.004"

114 µm

110 µm

Vertical Field of View, 20x

11.40 mm 0.45"

11400 µm

Vertical Field of View, 80x

2.85 mm 0.11"

Vertical Image Capture Range, 20x

11.4 mm 0.449"

Vertical Image Capture Range, 80x

2.85 mm 0.112"

Video capture

75 fps for 240 x 180, 95 fps for 160 x 120

Weight

3.2 kg

1.3 kg

18 kg

Approx. 17.4 kg

Head: 33 kg, Controller: 4.8 kg

25.3 kg

Approx. 13 kg

Approx. 3 kg

Controller: 3 kg

Approx. 12 kg

Approx. 18.5 kg

Approx. 14.2 kg

23.8 kg

Approx. 17 kg

Approx. 19.5 kg

Approx. 3.5 kg

Working distance

20 x, 30 x, 50 x, 100 x, 150 x, 200 x: 25.5 mm 1"

250 x, 300 x, 500 x, 1000 x, 1500 x, 2000 x, 2500 x: 6.5 mm 0.26"

3 mm 0.12" or more

20 x, 40 x, 60 x, 80 x, 100 x, 120 x, 140 x, 160 x, 180 x, 200 x: 20.8 mm 0.82"

5 mm 0.20" or more

100 x, 200 x, 300 x, 500 x, 700 x, 1000 x:25 mm 0.98" (20 mm 0.79")

4.4 mm 0.17"

15 mm 0.59"

85.0 mm 3.35"

Working distance, 0.1 x

0.1 x: Approx. 7700 mm; Approx. 1500 mm; Approx. 720 mm

Vertical Field of View, 250x

0.92 mm 0.04"

Vertical Field of View, 30 x

7.6 mm 0.30"

7.60 mm 0.30"

Vertical Field of View, 300 x

0.76 mm 0.03"

Vertical Field of View, 300x

0.76 mm 0.03"

Vertical Field of View, 400x

0.57 mm 0.02"

Vertical Field of View, 60x

3.08 mm 0.12"

Vertical Image Capture Range, 5000x

0.05 mm 0.0020"

Vertical Field of View, 1000x

230 µm

229 µm

0.23 mm 0.01"

Vertical Field of View, 2500x

0.09 mm 0.003"

Vertical Image Capture Range, 2000x

0.11 mm 0.0043"

Vertical Image Capture Range, 30x

7.6 mm 0.299"

White light interferometry Height display resolution

0.01 nm

White balance

Push-set, manual

Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K)

Spectral interference film thickness measurement Repeatability s

0.1 nm

Vertical Image Capture Range, 6000x

0.04 mm 0.0016"

Transmitted illumination optical system

Operating distance: 45 mm 1.77 ", Pop-up mechanism (with automatic lamp shut off function)

Transmitted illumination mechanism

Electronic brightfield aperture (0 %, 20 %, 40 %, 60 %, 80 %, 100 %) /Phase contrast slit (PhL, Ph1, Ph2)

XY motorized stage movement speed

10 mm 0.39"/sec (max)

20 mm 0.79"/sec (max)

XY-stage movement range

±35 mm ±1.38"

X: ±37.5 mm ±1.48", Y: ±25 mm ±0.98"

±20 mm ±0.79"

±50 mm ±1.97"

Z-stage movement range

28 mm 1.10"

53 mm 2.09"

47 mm 1.85"

XY stage configuration; Manual operation range

70 x 70 mm 2.76” x 2.76”

Vertical Field of View, 180x

1.27 mm 0.05"

Vertical Image Capture Range, 2500x

0.09 mm 0.0035"

Vertical Image Capture Range, 500x

0.46 mm 0.0181"

0.46 mm 0.018"

View direction When the Lateral view tube is installed

90 Degrees (Lateral view)

XY motorized stage motor

2-phase stepping motor

XY motorized stage resolution

1 µm (typical)

Z motorized stage travel speed

5 mm 0.19" /sec (max)

17 mm 0.67" /sec (max)

Z stage Focus Axis: Motorized/Manual

Motorized

White-light-receiving element

High-definition color CMOS

Vertical Field of View, 100x

2.28 mm 0.09"

2280 µm

Vertical Field of View, 700 x

0.33 mm 0.01"

7.5 to 8.8 mm

14.5 mm

16.5 mm

8.5 mm

Vertical Field of View, 1 x

240 mm 9.45"

Vertical Field of View, 5 x

45.5 mm 1.79"

Vertical Field of View, 5000x

46 µm

Vertical Image Capture Range, 50x

4.56 mm 0.180"

White light interferometry Width display resolution

0.1 nm

Vertical Field of View, 200 x

1.14 mm 0.04"

Vertical Image Capture Range, 100x

2.28 mm 0.090"

Video capture With binning

28 fps for 960 x 720, 40 fps for 640 x 480, 50 fps for 480 x 360

View direction When the borescope lens alone/With the Guard tube installed

0 Degrees (Direct view)

XY stage: Motorized/Manual

Manual

Motorized

White light interferometry Surface topography repeatability

0.08 nm

XY? stage size

Top surface: 233 x 185 mm 9.17" x 7.28" (center disk: ø168 ø6.61")

Top surface: 180 x 136 mm 7.09" x 5.35"

Top surface: 190 x 150 mm 7.48" x 5.91"

Top surface: 171 x 168 mm 6.73" x 6.61" (center disk: ø100 ø3.94")

Z motorized stage motor

2-phase stepper motor

5-phase stepper motor

5-phase stepping motor

Z stage travel range

49 mm 1.93"

Motorized : 29 mm 1.14" Manual : 33 mm 1.30"

Working distance, 5 x, 10 x, 30 x, 50 x

95 mm 3.74"

Z motorized stage movement speed

17 mm 0.67"/sec (max)

Tilt mechanism

Up to 45 Degrees

Vertical Field of View, 140x

1.63 mm 0.06"

Vertical Field of View, 20 x

11.40 mm 0.45"

Vertical Field of View, 200x

1.14 mm 0.04"

1140 µm

Vertical Field of View, 3000x

76 µm

Vertical Field of View, 40x

5.70 mm 0.22"

Vertical Image Capture Range, 300x

0.76 mm 0.030"

Vertical Image Capture Range, 40x

5.7 mm 0.224"

Vertical Image Capture Range, 700x

0.33 mm 0.0130"

Video capture 8-bit monochrome

15 fps for 1,280 x 960

Video capture Color

8.5 fps for 1,280 x 960

Stage rotation

360 Degrees (infinite rotation)

Total magnification

42 to 28800x

Transmitted lighting

20x or higher

Vertical Field of View, 0.1 x

2400 mm 94.49"

Vertical Field of View, 0.5 x

480 mm 18.9"

Vertical Image Capture Range, 150x

1.52 mm 0.060"

Vertical Image Capture Range, 400x

0.57 mm 0.022"

White light interferometry Repeatability of RMS

0.008 nm

Z stage: Motorized/Manual

Motorized

Manual

Vertical Field of View, 100 x

2.28 mm 0.09"

Vertical Field of View, 160x

1.43 mm 0.06"

Vertical Field of View, 500 x

0.46 mm 0.02"

Vertical Image Capture Range, 200x

1.14 mm 0.045"

Vertical Image Capture Range, 4000x

0.06 mm 0.0024"

View direction

VH-F61 : Direct view , VH-F111 : Direct view

XY stage configuration; Motorized operation range

100 x 100 mm 3.94” x 3.94”

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