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3D Surface Profiler Controller

by Keyence Corp

$36,800.00/EA

Average lead time: Call for Lead Time

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Product Description

Specifications

Additional Information

Product Description

3D Surface Profiler Controller

Specifications

Inventory Number:

KYCVKX3000EA

Part Number:

VK-X3000

Supplier:

Keyence Corp

Supplier's Lead Time:

Call for Lead Time

Quantity:

1 per EA

Contract Availability:

GSA

Country of Origin:

Japan

Ambient temperature:

+15 to 28 Degrees C 59 to 82.4 Degrees F

Field of view:

11 to 7398 µm

Focus variation Height accuracy:

0.2+L/ 100 µm or less

Focus variation Height display resolution, VK-X3050:

1 nm

Focus variation Height display resolution, VK-X3100:

0.1 nm

Focus variation Height repeatability s, VK-X3050:

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 30 nm

Focus variation Height repeatability s, VK-X3100:

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 20 nm

Focus variation Width accuracy:

Measured value ±2% or less

Focus variation Width display resolution, VK-X3050:

1 nm

Focus variation Width display resolution, VK-X3100:

0.1 nm

Focus variation Width repeatability 3s, VK-X3050:

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 65 nm

Focus variation Width repeatability 3s, VK-X3100:

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 50 nm

Laser class:

Class 2 (IEC60825-1, FDA (CDRH) Part 1040.10)

Laser confocal Height accuracy:

0.2+L/ 100 µm or less

Laser confocal Height display resolution, VK-X3050:

1 nm

Laser confocal Height display resolution, VK-X3100:

0.1 nm

Laser confocal Height repeatability s, VK-X3050:

10x: 100 nm, 20x: 40 nm, 50x: 20 nm

Laser confocal Height repeatability s, VK-X3100:

10x: 100 nm, 20x: 40 nm, 50x: 12 nm

Laser confocal Width accuracy:

Measured value ±2% or less

Laser confocal Width display resolution, VK-X3050:

1 nm

Laser confocal Width display resolution, VK-X3100:

0.1 nm

Laser confocal Width repeatability 3s, VK-X3050:

10x: 400 nm, 20x: 100 nm, 50x: 50 nm

Laser confocal Width repeatability 3s, VK-X3100:

10x: 200 nm, 20x: 100 nm, 50x: 40 nm

Laser light-receiving element:

16-bit photomultiplier

Laser wavelength, VK-X3050:

Semiconductor laser, 661 nm

Laser wavelength, VK-X3100:

Semiconductor laser, 404 nm

Max. laser measurement speed:

Surface: 125 Hz, Line: 7900 Hz

Max. laser output:

0.9 mW

Measurement principle:

Laser confocal, Focus variation, White light interferometry, Spectral interference

Optical observation; Number of pixels:

5.6 million

Optical observation; Optical zoom:

1 to 8x

Optical observation; Revolver:

6-hole electric revolver

Optical observation; Ring illumination lens:

2.5x, 5x, 10x

Power consumption:

150 VA

Power voltage:

100 to 240 VAC, 50/60 Hz

Relative humidity:

20 to 80% RH (No condensation)

Spectral interference film thickness measurement Accuracy:

±0.6%

Spectral interference film thickness measurement Repeatability s:

0.1 nm

Total magnification:

42 to 28800x

Type:

Controller

Weight:

Approx. 3 kg

White light interferometry Height display resolution:

0.01 nm

White light interferometry Repeatability of RMS:

0.008 nm

White light interferometry Surface topography repeatability:

0.08 nm

White light interferometry Width display resolution:

0.1 nm

White light source:

White LED

White-light-receiving element:

High-definition color CMOS

XY stage configuration; Manual operation range:

70 x 70 mm 2.76” x 2.76”

XY stage configuration; Motorized operation range:

100 x 100 mm 3.94” x 3.94”

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3D Surface Profiler Controller

by Keyence Corp

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