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As a leading supplier of sensors, measuring systems, laser markers, microscopes, and machine vision systems worldwide, KEYENCE is at the forefront of factory automation. They strive to develop innovative and reliable products to meet the needs of our customers in every manufacturing industry.

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Power supply units

Radio or television wire

$0~$10(9)
$10~$25(4)
$25~$50(8)
$50~$75(9)
$75~$100(8)
$100~$200(32)
$200~$300(21)
$300~$400(25)
$400~$500(29)
$500~$750(35)
$750~$1000(39)
$1000~$5000(214)
$5000~$10000(71)
$10000~$50000(124)
$50000~$100000(17)
$100000~$3000000(2)

? rotation angle

±90 Degrees

360 Degrees

Ambient temperature

+10 to +80 Degrees C 50 to 176 Degrees F

+15 to 28 Degrees C 59 to 82.4 Degrees F

+5 to +40 Degrees C 41 to 104 Degrees F

+5 to 40 Degrees C +41 to 104 Degrees F

+15 to 35 Degrees C 59 to 95 Degrees F

0 to +40 Degrees C 32 to 104 Degrees F

Ambient humidity range

20 to 80% RH (no condensation)

Ambient temperature range

+ 15 to + 30 Degrees C +59 to + 86 Degrees F

Applicable OS

Windows®10 Pro 64 bit

Applicable product

VH-Z20UR/Z20UW, VH-Z100R/W, VH-Z100UR/W

OP-87270

VR-3050, VR-3100

VH-Z20UR/Z20UW

OP-87270/VH-Z20UR/Z20UW

Automatic rotation combined measurements

Yes

Automatic rotation combined measurements Stitching Function

Yes

Automatic rotation combined measurements Stitching Functions

Yes

Automatic XY combined measurement range, Low magnification (2 × 2 composition)

VL-550: ø500 x H 200 mm ø19.69" x H 7.87"

Automatic XY combined measurement range, Low magnification (3 × 1 composition)

VL-550: W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

Back-focus adjustment

Not required

Automatic XY combined measurement range Low magnification (3 × 1 composition)

W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

Automatic XY combined measurement range, High magnification (2 × 2 composition)

VL-550: ø110 x H 50 mm ø4.33" x H 1.97"

Automatic XY combined measurements

VL-550: Yes

Automatic XY combined measurement range, High magnification (3 × 1 composition)

VL-550: W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Bendable sleeve angle

VH-F61 : 120 Degrees (up and down) , VH-F111 : 120 Degrees (up and down), 100 Degrees (right and left)

Binning

On-chip binning (2 x 2, 3 x 3, 4 x 4, 8 x 8, 12 x 12)

Borescope lens zoom attachment

VH-BA

Built-In Light Source Service life

40 thousand hours (reference value)

BZ-H4C/Hybrid Cell Count

Cell count (Phase contrast, Brightfield, Fluorescence) , Mask cell count

BZ-H4XF/Sectioning Module

Optical sectioning image mode

BZ-H4XI/Image Cytometer Module

Batch capture (user location specified/all locations specified/random location specified) *BZ-H4XD required/Image cytometer analysis, batch analysis *BZ-H4C required

BZ-H4CM/Macro Cell Count

Macro cell count (Batch analysis of multiple images)

BZ-H4K/Motion Analysis Application

Motion tracking, Motion analysis, (with addition of BZ-H4C) Time-series cell count

BZ-H4M/Measurement Application

Dimension measurement, Area measurement, Brightness measurement (line profile, histogram)

BZ-H4XT/Time-lapse Module

Time-lapse imaging, Video capturing, Time-series brightness measurement

Auto exposure method

User-specified area, average/peak

Automatic XY combined measurement range High magnification (2 × 2 composition)

ø110 x H 50 mm ø4.33" x H 1.97"

Automatic XY combined measurement range High magnification (3 × 1 composition)

W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Automatic XY combined measurement range Low magnification (2 × 2 composition)

ø500 x H 200 mm ø19.69" x H 7.87"

Basic optical system

Inverted fluorescence phase contrast microscope

Built-In Light Source Type

High-intensity LED

BZ-H4A/Advanced Analysis Software

Image stitching, Haze reduction, Full focus

BZ-H4R/3D Application

3D display, 3D measurement, XYZ slicing, Maximum projection, Video saving, (with addition of BZ-H4C) 3D cell count

BZ-H4XD/Advanced Observation Module

Navigation, Image stitching, Z-stack, Coordinate-specific condition setting

CCD cooling mechanism

Peltier cooling: 5 Degrees C 41 Degrees F (Reduction amount: 25 Degrees C 45 Degrees F)

Control PC

Dedicated PC specified by KEYENCE (OS: Windows 10)

Depth of field

Approx.1.5 µm

Approx.55 µm

Approx.1.0 µm

Approx.14 µm

Approx.33 µm

Approx.0.4 µm

Approx.0.6 µm

Approx.2.7 µm

Approx.6.1 µm

Depth of Field, 200 x

0.44 mm 0.02"

Depth of Field, 100 x

1.6 mm 0.06"

Depth of Field, 30 x

15.5 mm 0.61"

Controller Dimensions

Controller: 227.5 (H) x 125 (W) x 403 mm (D) 8.96 " (H) x 4.92 " (W) x 15.87 " (D)

Diagonal Field of View, 1000 x

0.38 mm 0.01"

Diagonal Field of View, 1000x

0.38 mm 0.01"

381 µm

380 µm

Diagonal Field of View, 100x

3.81 mm 0.15"

3810 µm

Diagonal Field of View, 200 x

1.91 mm 0.08"

1.90 mm 0.07"

Diagonal Field of View, 2000x

0.19 mm 0.007"

190 µm

191 µm

Diagonal Field of View, 200x

1910 µm

1.90 mm 0.07"

1.91 mm 0.08"

Diagonal Field of View, 20x

19.05 mm 0.75"

19050 µm

Diagonal Field of View, 30 x

12.7 mm 0.5"

12.70 mm 0.50"

Diagonal Field of View, 40x

9.53 mm 0.38"

Diagonal Field of View, 500 x

0.76 mm 0.03"

Diagonal Field of View, 5000x

76 µm

Diagonal Field of View, 700 x

0.54 mm 0.02"

Diagonal Field of View, 80x

4.76 mm 0.19"

Diagonal Image Capture Range, 100x

3.81 mm 0.150"

Diagonal Image Capture Range, 20x

19.05 mm 0.750"

Diagonal Image Capture Range, 6000x

0.06 mm 0.0024"

Controller

VL-500

Controller Weight

3.8 kg 8.38 lb

Depth of Field, 150 x

0.74 mm 0.03"

Diagonal Field of View, 0.1 x

4000 mm 157.5"

Diagonal Field of View, 0.5 x

800 mm 31.5"

Diagonal Field of View, 10 x

38.1 mm 1.5"

Diagonal Field of View, 150 x

2.54 mm 0.10"

Diagonal Field of View, 1500x

0.25 mm 0.009"

Diagonal Field of View, 160x

2.38 mm 0.09"

Diagonal Field of View, 300 x

1.27 mm 0.05"

Diagonal Field of View, 400x

0.95 mm 0.04"

Diagonal Field of View, 5 x

76.2 mm 3"

Diagonal Image Capture Range, 5000x

0.08 mm 0.0031"

Diagonal Image Capture Range, 500x

0.76 mm 0.0299"

0.76 mm 0.030"

Diagonal Image Capture Range, 50x

7.62 mm 0.300"

Diagonal Image Capture Range, 700x

0.54 mm 0.0213"

Dichroic mirror wavelength

400 nm

565 nm

585 nm

660 nm

425 nm

495 nm

Depth of Field, 20 x

34 mm 1.34"

Depth of Field, 50 x

6.0 mm 0.24"

Dimensions

VH-F61 : ø6.1 mm0.24",VH-F111 : ø11 mm 0.433"

Diagonal Field of View, 1 x

400 mm 15.75"

Diagonal Field of View, 140x

2.72 mm 0.11"

Diagonal Field of View, 180x

2.12 mm 0.08"

Diagonal Field of View, 2500x

0.15 mm 0.005"

Diagonal Field of View, 3000x

127 µm

Diagonal Field of View, 300x

1.27 mm 0.05"

Diagonal Field of View, 50 x

7.6 mm 0.30"

7.62 mm 0.30"

Diagonal Field of View, 500x

760 µm

762 µm

0.76 mm 0.03"

Diagonal Field of View, 60x

6.35 mm 0.25"

Diagonal Image Capture Range, 1000x

0.38 mm 0.0150"

3.81 mm 0.150"

Diagonal Image Capture Range, 1500x

0.25 mm 0.0098"

Diagonal Image Capture Range, 150x

2.54 mm 0.100"

Diagonal Image Capture Range, 2000x

0.19 mm 0.0075"

Diagonal Image Capture Range, 300x

1.27 mm 0.050"

Diagonal Image Capture Range, 30x

12.7 mm 0.500"

Diagonal Image Capture Range, 40x

9.53 mm 0.375"

Diagonal Image Capture Range, 80x

4.76 mm 0.187"

Effective length

276 mm 10.87"

141.5 mm 5.57"

185.3 mm 7.30"

VH-F61 : 1000 mm 39.37" , VH-F111 : 1500 mm 59.06"

95 mm 3.74"

Display resolution

0.1 µm 0.000004"

0.1 µm

Electronic shutter

Auto, Manual, 1/30, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000

Auto, Manual, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000

Auto; 1/7500 to 60 sec. (77 increments)

Emission wavelength

700/75 nm

605/70 nm

630/75 nm

460/50 nm

525/50 nm

Excitation wavelength

470/40 nm

545/25 nm

560/40 nm

620/60 nm

360/40 nm

395/25 nm

Fast Resolution

2048 (H) x 1536 (V)

Diagonal Field of View, 100 x

3.81 mm 0.15"

Diagonal Field of View, 120x

3.18 mm 0.13"

Diagonal Field of View, 20 x

19.05 mm 0.75"

Diagonal Field of View, 250x

1.52 mm 0.06"

Diagonal Field of View, 50x

7.62 mm 0.30"

Diagonal Image Capture Range, 200x

1.91 mm 0.075"

Diagonal Image Capture Range, 2500x

0.15 mm 0.0059"

Diagonal Image Capture Range, 4000x

0.1 mm 0.0039"

Diagonal Image Capture Range, 400x

0.95 mm 0.037"

Field of view

11 to 7398 µm

242x182 µm

725x546 µm

145x109 µm

3623x2728 µm

1449x1091 µm

362x273 µm

7247x5456 µm

Focus variation Height display resolution

1 nm

0.1 nm

Focus variation Height repeatability s

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 20 nm

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 30 nm

Focus variation Height repeatability s, VK-X3050

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 30 nm

Focus variation Width display resolution

1 nm

0.1 nm

Focus variation Width display resolution, VK-X3100

0.1 nm

Focus variation Width repeatability 3s

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 65 nm

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 50 nm

Fine mode Measurement resolution (16M Mode)

16 million points

Fluorescence dimming mechanism

Electronic dimming (0.3 %, 5 %, 10 %, 20 %, 40 %, 100 %)

Focus variation Height display resolution, VK-X3100

0.1 nm

Focus variation Width repeatability 3s, VK-X3050

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 65 nm

Fine mode (16M Mode) Measurement resolution, VL-550

VL-550: 16 million points

Fluorescent incident illumination

Optical sectioning system

Focus variation Height accuracy

0.2+L/ 100 µm or less

Focus variation Height display resolution, VK-X3050

1 nm

Focus variation Width accuracy

Measured value ±2% or less

Focus variation Width repeatability 3s, VK-X3100

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 50 nm

Fluorescent light source

80 W metal halide lamp

Focus variation Height repeatability s, VK-X3100

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 20 nm

Focus variation Width display resolution, VK-X3050

1 nm

Frame rate

30 F/S (max.)

15 fps for monochrome recording (up to 95 fps with binning) , 8.5 fps for color recording

50 F/S (max.)

Gain

0 dB, +6 dB, +12 dB, +18 dB

Manual, Preset

Head Dimensions

Head: 517 (H) x 340 (W) x 496 mm (D) 20.35 " (H) x 13.39 " (W) x 19.53 " (D)

High accuracy Resolution

6144 (H) x 4608 (V)

12,000 (H) x 9000 (V)

High dynamic range

16-bit intensity range through RGB data from each pixel

High magnification Measurement range

ø70 x H 50 mm ø2.76" x H 1.97"

Horizontal Field of View, 1 x

320 mm 12.6"

Horizontal Field of View, 160x

1.91 mm 0.08"

Horizontal Field of View, 200x

1.52 mm 0.06"

1.53 mm 0.06"

1520 µm

Horizontal Field of View, 20x

15.24 mm 0.60"

15240 µm

Horizontal Field of View, 250x

1.22 mm 0.05"

Horizontal Field of View, 400x

0.76 mm 0.03"

Horizontal Field of View, 50 x

6.1 mm 0.24"

6.10 mm 0.24"

Horizontal Field of View, 60x

5.08 mm 0.20"

Horizontal Image Capture Range, 150x

2.03 mm 0.080"

Horizontal Image Capture Range, 20x

15.24 mm 0.600"

Horizontal Image Capture Range, 2500x

0.12 mm 0.0047"

Horizontal Image Capture Range, 4000x

0.08 mm 0.0031"

Horizontal Image Capture Range, 400x

0.76 mm 0.030"

Horizontal Image Capture Range, 40x

7.62 mm 0.300"

Horizontal Image Capture Range, 500x

0.61 mm 0.0240"

0.61 mm 0.024"

High magnification (3 × 1 composition)

VL-550: W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Image element

1/1.7-inch, 12.22-megapixel CMOS image sensor

Image receiving element

1/1.8 inch, 3.19 megapixel CMOS image sensor

2/3 inch, 2.83 million pixel monochrome CCD (colorized with LC filter)

Horizontal Field of View, 0.1 x

3200 mm 126"

Horizontal Field of View, 100 x

3.05 mm 0.12"

Horizontal Field of View, 180x

1.69 mm 0.07"

Horizontal Field of View, 20 x

15.24 mm 0.60"

Horizontal Field of View, 2000x

0.15 mm 0.005"

152 µm

150 µm

Horizontal Field of View, 30 x

10.2 mm 0.40"

10.16 mm 0.40"

Horizontal Field of View, 500 x

0.61 mm 0.02"

Horizontal Field of View, 5000x

61 µm

Horizontal Field of View, 500x

610 µm

0.61 mm 0.02"

Horizontal Field of View, 50x

6.09 mm 0.24"

Horizontal Field of View, 80x

3.81 mm 0.15"

Horizontal Image Capture Range, 1000x

0.31 mm 0.0122"

3.05 mm 0.120"

Horizontal Image Capture Range, 200x

1.52 mm 0.060"

Horizontal Image Capture Range, 30x

10.16 mm 0.400"

High magnification (2 × 2 composition)

VL-550: ø110 x H 50 mm ø4.33" x H 1.97"

Horizontal Field of View, 100x

3050 µm

3.05 mm 0.12"

Horizontal Field of View, 200 x

1.52 mm 0.06"

1.53 mm 0.06"

Horizontal Field of View, 3000x

102 µm

Horizontal Image Capture Range, 50x

6.10 mm 0.240"

Horizontal Image Capture Range, 6000x

0.05 mm 0.0020"

Horizontal Image Capture Range, 80x

3.81 mm 0.150"

Image-formation optical system

Fixed image-forming lens, electronic LC filter insertion/removal mechanism

High-resolution

2880 (H) x 2160 (V) (4K Mode OFF), 4000 (H) x 3000 (V) (4K Mode ON)

Horizontal Field of View, 0.5 x

640 mm 25.2"

Horizontal Field of View, 10 x

30.5 mm 1.20"

Horizontal Field of View, 1000 x

0.30 mm 0.01"

Horizontal Field of View, 1000x

0.31 mm 0.01"

300 µm

305 µm

Horizontal Field of View, 120x

2.54 mm 0.10"

Horizontal Field of View, 140x

2.18 mm 0.09"

Horizontal Field of View, 150 x

2.03 mm 0.08"

Horizontal Field of View, 1500x

0.2 mm 0.01"

Horizontal Field of View, 2500x

0.12 mm 0.004"

Horizontal Field of View, 300 x

1.02 mm 0.04"

Horizontal Field of View, 300x

1.02 mm 0.04"

Horizontal Field of View, 40x

7.62 mm 0.30"

Horizontal Field of View, 5 x

61 mm 2.40"

Horizontal Field of View, 700 x

0.44 mm 0.02"

Horizontal Image Capture Range, 100x

3.05 mm 0.120"

Horizontal Image Capture Range, 1500x

0.20 mm 0.0079"

Horizontal Image Capture Range, 2000x

0.16 mm 0.0063"

Horizontal Image Capture Range, 300x

1.02 mm 0.040"

Horizontal Image Capture Range, 5000x

0.06 mm 0.0024"

Horizontal Image Capture Range, 700x

0.44 mm 0.0173"

Laser class

Class 2 (IEC60825-1, FDA (CDRH) Part 1040.10)

Laser confocal Height display resolution

0.1 nm

1 nm

Laser confocal Height display resolution, VK-X3100

0.1 nm

Laser confocal Height repeatability s

10x: 100 nm, 20x: 40 nm, 50x: 12 nm

10x: 100 nm, 20x: 40 nm, 50x: 20 nm

Laser confocal Width accuracy

Measured value ±2% or less

Laser confocal Width display resolution

0.1 nm

1 nm

Laser confocal Width repeatability 3s, VK-X3100

10x: 200 nm, 20x: 100 nm, 50x: 40 nm

Laser confocal Height repeatability s, VK-X3100

10x: 100 nm, 20x: 40 nm, 50x: 12 nm

Laser confocal Width repeatability 3s

10x: 400 nm, 20x: 100 nm, 50x: 50 nm

10x: 200 nm, 20x: 100 nm, 50x: 40 nm

Laser confocal Width repeatability 3s, VK-X3050

10x: 400 nm, 20x: 100 nm, 50x: 50 nm

Laser light-receiving element

16-bit photomultiplier

Laser wavelength, VK-X3100

Semiconductor laser, 404 nm

Light blocking curtain Weight

5.5 kg 12.13 lb (VL-550), 3.6 kg 7.94 lb (VL-530)

3.6 kg 7.94 lb

5.5 kg 12.13 lb

Load capacity

3 kg

50 kg 110.23 lb

5 kg

1 kg

20 kg 44.09 lb

Low magnification Measurement range

ø300 x H 200 mm ø11.81" x H 7.87"

Magnification

100 x, 200 x, 300 x, 500 x, 700 x, 1000 x

20x, 30x, 40x, 50x, 80x, 100x

500 x, 1000 x, 2000 x, 3000 x, 5000 x

0.1 x, 0.5 x, 1 x, 5 x, 10 x, 30 x, 50 x

20 x, 100 x, 200 x, 500 x, 1000 x, 2000 x

20 x, 30 x, 50 x, 100 x, 150 x, 200 x

250 x, 300 x, 500 x, 1000 x, 1500 x, 2000 x, 2500 x

2500x, 4000x, 5000x, 6000x

100x, 150x, 200x, 300x, 400x, 500x

20 x, 40 x, 60 x, 80 x, 100 x, 120 x, 140 x, 160 x, 180 x, 200 x

50 x, 100 x, 200 x, 300 x, 400 x, 500 x

500x, 700x, 1000x, 1500x, 2000x, 2500x

Load capacity, VL-530

VL-530: 20 kg 44.09 lb

Manual operation range

70 x 70 mm 2.76” x 2.76”

Maximum observation magnification

150x

360x

140x

125x

135x

Max. laser output

0.9 mW

Laser confocal Height display resolution, VK-X3050

1 nm

Laser confocal Height repeatability s, VK-X3050

10x: 100 nm, 20x: 40 nm, 50x: 20 nm

Laser wavelength

Semiconductor laser, 661 nm

Semiconductor laser, 404 nm

Laser wavelength, VK-X3050

Semiconductor laser, 661 nm

Load capacity VL-530

VL-530: 20 kg 44.09 lb

Load capacity VL-550

VL-550: 50 kg 110.23 lb

Load capacity, VL-550

VL-550: 50 kg 110.23 lb

Low magnification (2 × 2 composition)

VL-550: ø500 x H 200 mm ø19.69" x H 7.87"

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Measurement resolution Fine mode (16M Mode)

VL-550: 16 million points

Measurement range Low magnification

ø300 x H 200 mm ø11.81" x H 7.87"

Measurement resolution Standard mode (4M Mode)

4 million points

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz

Laser confocal Height accuracy

0.2+L/ 100 µm or less

Laser confocal Width display resolution, VK-X3050

1 nm

Laser confocal Width display resolution, VK-X3100

0.1 nm

Minimum view range

2.2 mm 0.09"

0.8 mm 0.03"

2 mm 0.08"

2.4 mm 0.09"

Low magnification (3 × 1 composition)

VL-550: W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

Measurement light source

Blue LED

Measurement range High magnification

ø70 x H 50 mm ø2.76" x H 1.97"

Measurement accuracy

±10 µm 0.0004"

Measurement unit

VL-570

Measurement Unit Weight

18.5 kg 40.79 lb

0.1

0.13

0.45

0.3

0.6

1.4

0.2

0.75

0.95

1.45

Motor

5-phase stepping motor

Motorized filter turret

Up to four filters can be mounted. Automatic position recognition and automatic excitation shutdown during filter replacement

Motorized operation range

100 x 100 mm 3.94” x 3.94”

Motorized XY stage

114 x 80 mm 4.49 " x 3.15 " stroke, minimum 1 µm pitch min.

Number of pixels in recorded image

4,080 x 3,060 max (12.5 megapixel, high-quality interpolation)

Observation distance

24 mm 0.945"

30 mm 1.181" (22.9 mm 0.902")

1 mm 0.0394"

6.3 mm 0.2480"

Observation light source

LEDs in 3 colors (red, green, blue)

Observation software

Multi-color image capturing, Auto focus, Quick full-focusing, Scale display, Electronic revolver control, Electronic stage control

Oil & waterproof

Machine oil and light oil

Optical observation; Number of pixels

5.6 million

Optical receiver system

Low/high magnification offset dual optical module

Outer diameter When the Lateral view tube is installed

ø10.5 mm 0.413"

ø2.0 mm 0.079"

ø4.4 mm 0.173"

ø5.9 mm 0.232"

ø3.0 mm 0.118"

Overvoltage category

Observation modes

Brightfield, Fluorescence (wide-field/sectioning) , Phase contrast (PhL, Ph1, Ph2) , Oblique illumination

Motorized Z stage

8 mm 0.31 " stroke, minimum 0.1 µm pitch min.

Movement accuracy

4 + 0.02L (µm)

Optical observation; Ring illumination lens

2.5x, 5x, 10x

Output signal, gradations

14-bit/8-bit monochrome, 8-bit R/G/B

Observation depth

VH-F61 : 10 mm to 80.39" to 8 , VH-F111 : 20 mm to 80.79" to 8

Optical observation; Optical zoom

1 to 8x

Optical observation; Revolver

6-hole electric revolver

Pollution degree

Optical zoom

1 to 8x

Power consumption

18 VA

30 VA

130 VA

250 VA

50 VA

70 VA

150 VA

60 VA

Controller/Measurement unit: 200 VA

Power consumption VL-550: Controller/Measurement unit:

200 VA, Stage: 80 VA

Power consumption, VL-550

VL-550: Controller/Measurement unit: 200 VA, Stage: 80 VA

Power supply

100 to 240 VAC ±10 %, 50/60 Hz

Power voltage

DC 12 V

12V DC 2.5 A

100 to 240 VAC ±10%, 50/60 Hz

100 to 240 VAC, 50/60 Hz

Outer diameter When the borescope lens alone/With the Guard tube installed

ø10.0 mm ø0.39"

ø2.7 (ø3.0) mm ø0.11" (ø0.12")

ø4.0 mm ø0.16"

ø1.8 (ø2.0) mm ø0.07" (ø0.08")

ø5.5 mm ø0.22"

Power consumption VL-530: Controller/Measurement unit:

200 VA, Stage: 200 VA

PC interface

USB2.0

Positioning accuracy

6 µm

Motorized: Operating range

100 x 100 mm 3.94” x 3.94”

Number of pixels

5.6 million

Objective lens switching

Six-mount electronic revolver

Objective lenses

Nikon CFI60 Series infinite optical system

Operating atmospheric pressure

1 atm

Optical transmitter system

Offset transmission-type projector module

Power consumption, VL-530

VL-530: Controller/Measurement unit: 200 VA, Stage: 200 VA

Relative humidity

35 to 80% RH (no condensation)

20 to 80% RH (No condensation)

35 to 80 % RH (No condensation)

Revolver

6-hole electric revolver

Side camera

Yes, VGA

Slide thickness

0.11 to 0.23

0 to 2

0.17

1.2

Spectral interference film thickness measurement Accuracy

±0.6%

Stage configuration

Motorized XY theta stage mechanism

Motorized theta stage mechanism

Stage configuration, VL-550

Motorized XY theta stage mechanism

VL-550: Motorized XY theta stage mechanism

Stage stroke distance

100 mm 3.94" in the X and Y directions, respectively

15 mm 0.59"

Stage Weight

25.4 kg 56.00 lb

26 kg 57.32 lb

26 kg 57.32 lb (VL-550), 25.4 kg 56.00 lb (VL-530)

Repeatability (s)

2 µm 0.000079"

Supercharge shutter

Can be set in 0.01 s increments from 0.03 to 4 s

Can be set in 0.01 s increments from 0.02 to 16 s

Scanning system

Progressive

Repeatability

±0.5 µm

Resolution

0.05 µm/pulse

Ring illumination lens

2.5x, 5x, 10x

Stage

VL-550,VL-530

Stage rotation

360 Degrees (infinite rotation)

Standard Resolution

2048 (H) x 1536 (V)

2880 (H) x 2160 (V)

Transmitted light source

3.7 W LED

Transmitted lighting

Provided

20x or higher

Specimen enclosure

The stage is fully contained in a built-in darkroom

Spectral interference film thickness measurement Repeatability s

0.1 nm

Stage movement range

ø200 mm ø7.87"

VL-550: ø200 mm ø7.87"

Stage Power Supply

200 VA

80 VA

Standard mode (4M Mode) Measurement resolution

4 million points

Type

Borescope lens

Lens attachment

Tilt stage

Wide Area Illumination Adapter

Measurement unit

Variable illumination adapter

Z stage

Anti-vibration, high-magnification observation system

Diffuse Illumination Adapter

Measurement head

Triple Light Base Unit

Real bore zoom attachment

Stage

Type

Controller

Stage configuration, VL-530

Motorized theta stage mechanism

VL-530: Motorized theta stage mechanism

Standard mode Measurement resolution (4M Mode)

4 million points

Vertical Field of View, 1000x

230 µm

0.23 mm 0.01"

229 µm

Vertical Field of View, 2000x

114 µm

0.11 mm 0.004"

110 µm

Vertical Field of View, 20x

11400 µm

11.40 mm 0.45"

Vertical Field of View, 2500x

0.09 mm 0.003"

Vertical Field of View, 250x

0.92 mm 0.04"

Vertical Field of View, 30 x

7.6 mm 0.30"

7.60 mm 0.30"

Vertical Field of View, 300 x

0.76 mm 0.03"

Vertical Field of View, 300x

0.76 mm 0.03"

Vertical Field of View, 400x

0.57 mm 0.02"

Vertical Field of View, 60x

3.08 mm 0.12"

Vertical Image Capture Range, 2000x

0.11 mm 0.0043"

Vertical Image Capture Range, 30x

7.6 mm 0.299"

Vertical Image Capture Range, 5000x

0.05 mm 0.0020"

Vertical Image Capture Range, 6000x

0.04 mm 0.0016"

View angle

32 Degrees

VH-F61 : 65 Degrees, VH-F111 : 55 Degrees

30 Degrees

35 Degrees

0.17 to 0.25 mm

4 mm

14.5 mm

16.5 mm

20 mm

8.5 mm

0.6 mm

7.5 to 8.8 mm

0.13 mm

2.2 to 3.3 mm

Weight

1.3 kg

18 kg

Approx. 17.4 kg

Head: 33 kg, Controller: 4.8 kg

25.3 kg

Approx. 13 kg

Approx. 14.2 kg

Approx. 3 kg

Controller: 3 kg

3.2 kg

Approx. 12 kg

Approx. 18 kg

Approx. 20 kg

23.8 kg

Approx. 17 kg

Approx. 19.5 kg

Approx. 3.5 kg

White balance

Push-set, manual

Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K)

White light interferometry Height display resolution

0.01 nm

Working distance

20 x, 40 x, 60 x, 80 x, 100 x, 120 x, 140 x, 160 x, 180 x, 200 x: 20.8 mm 0.82"

250 x, 300 x, 500 x, 1000 x, 1500 x, 2000 x, 2500 x: 6.5 mm 0.26"

3 mm 0.12" or more

100 x, 200 x, 300 x, 500 x, 700 x, 1000 x:25 mm 0.98" (20 mm 0.79")

15 mm 0.59"

4.4 mm 0.17"

20 x, 30 x, 50 x, 100 x, 150 x, 200 x: 25.5 mm 1"

5 mm 0.20" or more

85.0 mm 3.35"

XY motorized stage motor

2-phase stepping motor

XY motorized stage movement speed

10 mm 0.39"/sec (max)

20 mm 0.79"/sec (max)

XY motorized stage resolution

1 µm (typical)

XY stage configuration; Manual operation range

70 x 70 mm 2.76” x 2.76”

XY-motorized stage motor

2-phase stepping motor

XY-motorized stage movement speed

10 mm 0.39"/sec (max.)

20 mm 0.79"/sec (max.)

XY-motorized stage resolution

1 µm (typ.)

XY-stage movement range

±35 mm ±1.38"

±20 mm ±0.79"

±50 mm ±1.97"

X: ±37.5 mm ±1.48", Y: ±25 mm ±0.98"

Supported lenses

VH-B18, VH-B27, VH-B40, VH-B55, VH-B100

Z motorized stage resolution

0.1 µm (typ.)

0.1 µm (typical)

1 µm (typical)

Z motorized stage travel speed

5 mm 0.19" /sec (max)

17 mm 0.67" /sec (max)

Z stage Focus Axis: Motorized/Manual

Motorized

Z-motorized stage motor

5-phase stepping motor

Z-motorized stage travel speed

17 mm 0.67"/sec (max)

Z-stage movement range

28 mm 1.10"

47 mm 1.85"

49 mm 1.93"

53 mm 2.09"

Total Pixels

4168 (H) x 3062 (V); virtual pixels: 4024 (H) x 3036 (V)

Total pixels: 2064 (H) x 1554 (V); virtual pixels: 2048 (H) x 1536 (V)

Transmitted illumination optical system

Operating distance: 45 mm 1.77 ", Pop-up mechanism (with automatic lamp shut off function)

Vertical Field of View, 100 x

2.28 mm 0.09"

Vertical Field of View, 160x

1.43 mm 0.06"

Vertical Field of View, 180x

1.27 mm 0.05"

Vertical Field of View, 200 x

1.14 mm 0.04"

Vertical Field of View, 500 x

0.46 mm 0.02"

Vertical Image Capture Range, 1000x

0.23 mm 0.0091"

2.28 mm 0.090"

Vertical Image Capture Range, 100x

2.28 mm 0.090"

Vertical Image Capture Range, 200x

1.14 mm 0.045"

Vertical Image Capture Range, 2500x

0.09 mm 0.0035"

Vertical Image Capture Range, 4000x

0.06 mm 0.0024"

Vertical Image Capture Range, 500x

0.46 mm 0.0181"

0.46 mm 0.018"

Video capture With binning

28 fps for 960 x 720, 40 fps for 640 x 480, 50 fps for 480 x 360

View direction

VH-F61 : Direct view , VH-F111 : Direct view

View direction When the borescope lens alone/With the Guard tube installed

0 Degrees (Direct view)

View direction When the Lateral view tube is installed

90 Degrees (Lateral view)

White light interferometry Surface topography repeatability

0.08 nm

White-light-receiving element

High-definition color CMOS

XY stage configuration; Motorized operation range

100 x 100 mm 3.94” x 3.94”

XY stage: Motorized/Manual

Motorized

Manual

XY? stage size

Top surface: 171 x 168 mm 6.73" x 6.61" (Center disc: ø100 ø3.94")

Top surface: 171 x 168 mm 6.73" x 6.61" (center disk: ø100 ø3.94")

Top surface: 233 x 185 mm 9.17" x 7.28" (center disk: ø168 ø6.61")

Top surface: 198 x 150 mm 7.80" x 5.91" (Center disk: ø136 ø5.35")

Top surface: 233 x 185 mm 9.17" x 7.28" (Center disc: ø168 ø6.61")

Top surface: 180 x 136 mm 7.09" x 5.35"

Top surface: 190 x 150 mm 7.48" x 5.91"

Z motorized stage motor

2-phase stepper motor

5-phase stepper motor

5-phase stepping motor

Z stage travel range

49 mm 1.93"

Motorized : 29 mm 1.14" Manual : 33 mm 1.30"

Z stage: Motorized/Manual

Manual

Motorized

Z-motorized stage resolution

0.1 µm (typ.)

Transmitted illumination mechanism

Electronic brightfield aperture (0 %, 20 %, 40 %, 60 %, 80 %, 100 %) /Phase contrast slit (PhL, Ph1, Ph2)

Tilt mechanism

Up to 45 Degrees

Total magnification

42 to 28800x

Vertical Field of View, 1 x

240 mm 9.45"

Vertical Field of View, 10 x

22.8 mm 0.80"

Vertical Field of View, 100x

2.28 mm 0.09"

2280 µm

Vertical Field of View, 120x

1.90 mm 0.07"

Vertical Field of View, 5 x

45.5 mm 1.79"

Vertical Field of View, 5000x

46 µm

Vertical Field of View, 500x

457 µm

460 µm

0.46 mm 0.02"

Vertical Field of View, 700 x

0.33 mm 0.01"

Vertical Field of View, 80x

2.85 mm 0.11"

Vertical Image Capture Range, 20x

11.4 mm 0.449"

Vertical Image Capture Range, 50x

4.56 mm 0.180"

Vertical Image Capture Range, 80x

2.85 mm 0.112"

Video capture

75 fps for 240 x 180, 95 fps for 160 x 120

White light interferometry Width display resolution

0.1 nm

Working distance, 0.1 x

0.1 x: Approx. 7700 mm; Approx. 1500 mm; Approx. 720 mm

Working distance, 5 x, 10 x, 30 x, 50 x

95 mm 3.74"

Z motorized stage movement speed

17 mm 0.67"/sec (max)

Vertical Field of View, 0.1 x

2400 mm 94.49"

Vertical Field of View, 0.5 x

480 mm 18.9"

Vertical Field of View, 1000 x

0.23 mm 0.01"

Vertical Field of View, 140x

1.63 mm 0.06"

Vertical Field of View, 150 x

1.52 mm 0.06"

Vertical Field of View, 1500x

0.15 mm 0.005"

Vertical Field of View, 20 x

11.40 mm 0.45"

Vertical Field of View, 200x

1.14 mm 0.04"

1140 µm

Vertical Field of View, 3000x

76 µm

Vertical Field of View, 40x

5.70 mm 0.22"

Vertical Field of View, 50 x

4.56 mm 0.18"

4.6 mm 0.18"

Vertical Field of View, 50x

4.57 mm 0.18"

Vertical Image Capture Range, 1500x

0.15 mm 0.0059"

Vertical Image Capture Range, 150x

1.52 mm 0.060"

Vertical Image Capture Range, 300x

0.76 mm 0.030"

Vertical Image Capture Range, 400x

0.57 mm 0.022"

Vertical Image Capture Range, 40x

5.7 mm 0.224"

Vertical Image Capture Range, 700x

0.33 mm 0.0130"

Video capture 8-bit monochrome

15 fps for 1,280 x 960

Video capture Color

8.5 fps for 1,280 x 960

White light interferometry Repeatability of RMS

0.008 nm

White light source

White LED

Z motorized/manual stage

Motorized

Z stage movement amount

49 mm 1.93"

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