3D Surface Profiler Measurement Head Red Laser

by Keyence Corp


  • VK-X3050 | 3D Surface Profiler Measurement Head Red Laser
  • VK-X3050 | 3D Surface Profiler Measurement Head Red Laser
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Product Description
3D Surface Profiler Measurement Head Red Laser
Specifications
Inventory Number:
KYCVKX3050EA
Part Number:
VK-X3050
Supplier:
Keyence Corp
Supplier's Lead Time:
Call for Lead Time
Quantity:
1 per EA
Contract Availability:
GSA
Country of Origin:
Japan
Ambient temperature:
+15 to 28 Degrees C 59 to 82.4 Degrees F
Field of view:
11 to 7398 µm
Focus variation Height accuracy:
0.2+L/ 100 µm or less
Focus variation Height display resolution:
1 nm
Focus variation Height repeatability s:
5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 30 nm
Focus variation Width accuracy:
Measured value ±2% or less
Focus variation Width display resolution:
1 nm
Focus variation Width repeatability 3s:
5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 65 nm
Laser class:
Class 2 (IEC60825-1, FDA (CDRH) Part 1040.10)
Laser confocal Height accuracy:
0.2+L/ 100 µm or less
Laser confocal Height display resolution:
1 nm
Laser confocal Height repeatability s:
10x: 100 nm, 20x: 40 nm, 50x: 20 nm
Laser confocal Width accuracy:
Measured value ±2% or less
Laser confocal Width display resolution:
1 nm
Laser confocal Width repeatability 3s:
10x: 400 nm, 20x: 100 nm, 50x: 50 nm
Laser light-receiving element:
16-bit photomultiplier
Laser wavelength:
Semiconductor laser, 661 nm
Manual operation range:
70 x 70 mm 2.76” x 2.76”
Max. laser measurement speed:
Surface: 125 Hz, Line: 7900 Hz
Max. laser output:
0.9 mW
Measurement principle:
Laser confocal, Focus variation, White light interferometry, Spectral interference
Motorized operation range:
100 x 100 mm 3.94” x 3.94”
Number of pixels:
5.6 million
Optical zoom:
1 to 8x
Power consumption:
150 VA
Power voltage:
100 to 240 VAC, 50/60 Hz
Relative humidity:
20 to 80% RH (No condensation)
Revolver:
6-hole electric revolver
Ring illumination lens:
2.5x, 5x, 10x
Spectral interference film thickness measurement Accuracy:
±0.6%
Spectral interference film thickness measurement Repeatability s:
0.1 nm
Total magnification:
42 to 28800x
Type:
Measurement head
Weight:
Approx. 13 kg
White light interferometry Height display resolution:
0.01 nm
White light interferometry Repeatability of RMS:
0.008 nm
White light interferometry Surface topography repeatability:
0.08 nm
White light interferometry Width display resolution:
0.1 nm
White light source:
White LED
White-light-receiving element:
High-definition color CMOS
Additional Information

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