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As a leading supplier of sensors, measuring systems, laser markers, microscopes, and machine vision systems worldwide, KEYENCE is at the forefront of factory automation. They strive to develop innovative and reliable products to meet the needs of our customers in every manufacturing industry.

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? rotation angle

360 Degrees

±90 Degrees

Ambient temperature

0 to +40 Degrees C 32 to 104 Degrees F

+10 to +80 Degrees C 50 to 176 Degrees F

+15 to 28 Degrees C 59 to 82.4 Degrees F

+5 to 40 Degrees C +41 to 104 Degrees F

+15 to 35 Degrees C 59 to 95 Degrees F

Applicable OS

Windows®10 Pro 64 bit

Automatic XY combined measurement range, High magnification (3 × 1 composition)

VL-550: W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Applicable product

VR-3050, VR-3100

VH-Z20UR/Z20UW

OP-87270

BZ-H4CM/Macro Cell Count

Macro cell count (Batch analysis of multiple images)

Automatic XY combined measurement range, High magnification (2 × 2 composition)

VL-550: ø110 x H 50 mm ø4.33" x H 1.97"

Automatic XY combined measurements

VL-550: Yes

Ambient humidity range

20 to 80% RH (no condensation)

Ambient temperature range

+ 15 to + 30 Degrees C +59 to + 86 Degrees F

Automatic rotation combined measurements Stitching Function

Yes

Automatic XY combined measurement range, Low magnification (3 × 1 composition)

VL-550: W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

Binning

On-chip binning (2 x 2, 3 x 3, 4 x 4, 8 x 8, 12 x 12)

Borescope lens zoom attachment

VH-BA

Built-In Light Source Service life

40 thousand hours (reference value)

BZ-H4C/Hybrid Cell Count

Cell count (Phase contrast, Brightfield, Fluorescence) , Mask cell count

BZ-H4XF/Sectioning Module

Optical sectioning image mode

BZ-H4XI/Image Cytometer Module

Batch capture (user location specified/all locations specified/random location specified) *BZ-H4XD required/Image cytometer analysis, batch analysis *BZ-H4C required

Automatic rotation combined measurements

Yes

Automatic XY combined measurement range, Low magnification (2 × 2 composition)

VL-550: ø500 x H 200 mm ø19.69" x H 7.87"

Back-focus adjustment

Not required

Bendable sleeve angle

VH-F61 : 120 Degrees (up and down) , VH-F111 : 120 Degrees (up and down), 100 Degrees (right and left)

Automatic XY combined measurement range Low magnification (3 × 1 composition)

W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

BZ-H4K/Motion Analysis Application

Motion tracking, Motion analysis, (with addition of BZ-H4C) Time-series cell count

BZ-H4M/Measurement Application

Dimension measurement, Area measurement, Brightness measurement (line profile, histogram)

BZ-H4XT/Time-lapse Module

Time-lapse imaging, Video capturing, Time-series brightness measurement

Automatic XY combined measurement range High magnification (2 × 2 composition)

ø110 x H 50 mm ø4.33" x H 1.97"

Basic optical system

Inverted fluorescence phase contrast microscope

Auto exposure method

User-specified area, average/peak

Automatic XY combined measurement range High magnification (3 × 1 composition)

W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Automatic XY combined measurement range Low magnification (2 × 2 composition)

ø500 x H 200 mm ø19.69" x H 7.87"

Depth of Field, 150 x

0.74 mm 0.03"

Diagonal Field of View, 50 x

7.62 mm 0.30"

7.6 mm 0.30"

Diagonal Field of View, 500x

760 µm

762 µm

0.76 mm 0.03"

Diagonal Image Capture Range, 150x

2.54 mm 0.100"

Built-In Light Source Type

High-intensity LED

BZ-H4A/Advanced Analysis Software

Image stitching, Haze reduction, Full focus

BZ-H4R/3D Application

3D display, 3D measurement, XYZ slicing, Maximum projection, Video saving, (with addition of BZ-H4C) 3D cell count

BZ-H4XD/Advanced Observation Module

Navigation, Image stitching, Z-stack, Coordinate-specific condition setting

Dichroic mirror wavelength

425 nm

400 nm

585 nm

565 nm

660 nm

495 nm

Electronic shutter

Auto, Manual, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000

Auto, Manual, 1/30, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000

Auto; 1/7500 to 60 sec. (77 increments)

Focus variation Height display resolution, VK-X3050

1 nm

Focus variation Width accuracy

Measured value ±2% or less

CCD cooling mechanism

Peltier cooling: 5 Degrees C 41 Degrees F (Reduction amount: 25 Degrees C 45 Degrees F)

Depth of Field, 200 x

0.44 mm 0.02"

Depth of field

Approx.33 µm

Approx.6.1 µm

Approx.55 µm

Approx.2.7 µm

Diagonal Field of View, 200 x

1.91 mm 0.08"

1.90 mm 0.07"

Diagonal Field of View, 30 x

12.7 mm 0.5"

12.70 mm 0.50"

Diagonal Image Capture Range, 20x

19.05 mm 0.750"

Diagonal Image Capture Range, 6000x

0.06 mm 0.0024"

Diagonal Field of View, 1000 x

0.38 mm 0.01"

Diagonal Field of View, 100x

3.81 mm 0.15"

3810 µm

Diagonal Field of View, 40x

9.53 mm 0.38"

Diagonal Field of View, 5000x

76 µm

Diagonal Field of View, 700 x

0.54 mm 0.02"

Depth of Field, 100 x

1.6 mm 0.06"

Depth of Field, 30 x

15.5 mm 0.61"

Dimensions

VH-F61 : ø6.1 mm0.24",VH-F111 : ø11 mm 0.433"

Diagonal Field of View, 0.1 x

4000 mm 157.5"

Diagonal Field of View, 0.5 x

800 mm 31.5"

Diagonal Field of View, 1000x

381 µm

380 µm

Diagonal Field of View, 150 x

2.54 mm 0.10"

Diagonal Field of View, 400x

0.95 mm 0.04"

Diagonal Image Capture Range, 5000x

0.08 mm 0.0031"

Diagonal Image Capture Range, 50x

7.62 mm 0.300"

Diagonal Field of View, 1 x

400 mm 15.75"

Diagonal Field of View, 180x

2.12 mm 0.08"

Diagonal Field of View, 3000x

127 µm

Diagonal Field of View, 300x

1.27 mm 0.05"

Diagonal Image Capture Range, 1000x

0.38 mm 0.0150"

3.81 mm 0.150"

Diagonal Image Capture Range, 2000x

0.19 mm 0.0075"

Diagonal Image Capture Range, 300x

1.27 mm 0.050"

Diagonal Image Capture Range, 80x

4.76 mm 0.187"

Controller Weight

3.8 kg 8.38 lb

Effective length

276 mm 10.87"

185.3 mm 7.30"

VH-F61 : 1000 mm 39.37" , VH-F111 : 1500 mm 59.06"

Depth of Field, 20 x

34 mm 1.34"

Depth of Field, 50 x

6.0 mm 0.24"

Control PC

Dedicated PC specified by KEYENCE (OS: Windows 10)

Emission wavelength

700/75 nm

605/70 nm

630/75 nm

525/50 nm

460/50 nm

Focus variation Height display resolution

1 nm

0.1 nm

Focus variation Width display resolution, VK-X3100

0.1 nm

Excitation wavelength

470/40 nm

560/40 nm

620/60 nm

360/40 nm

545/25 nm

395/25 nm

Fast Resolution

2048 (H) x 1536 (V)

Field of view

11 to 7398 µm

725x546 µm

3623x2728 µm

7247x5456 µm

1449x1091 µm

Focus variation Width display resolution

1 nm

0.1 nm

Diagonal Field of View, 10 x

38.1 mm 1.5"

Diagonal Image Capture Range, 700x

0.54 mm 0.0213"

Diagonal Field of View, 160x

2.38 mm 0.09"

Diagonal Field of View, 300 x

1.27 mm 0.05"

Diagonal Field of View, 5 x

76.2 mm 3"

Diagonal Image Capture Range, 500x

0.76 mm 0.0299"

0.76 mm 0.030"

Controller

VL-500

Fluorescence dimming mechanism

Electronic dimming (0.3 %, 5 %, 10 %, 20 %, 40 %, 100 %)

Fine mode (16M Mode) Measurement resolution, VL-550

VL-550: 16 million points

Display resolution

0.1 µm 0.000004"

Diagonal Field of View, 100 x

3.81 mm 0.15"

Diagonal Field of View, 200x

1.90 mm 0.07"

1.91 mm 0.08"

1910 µm

Diagonal Image Capture Range, 200x

1.91 mm 0.075"

Focus variation Width repeatability 3s

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 50 nm

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 65 nm

Focus variation Width repeatability 3s, VK-X3100

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 50 nm

Diagonal Field of View, 120x

3.18 mm 0.13"

Diagonal Field of View, 20 x

19.05 mm 0.75"

Diagonal Image Capture Range, 2500x

0.15 mm 0.0059"

Diagonal Image Capture Range, 4000x

0.1 mm 0.0039"

Diagonal Image Capture Range, 400x

0.95 mm 0.037"

Controller Dimensions

Controller: 227.5 (H) x 125 (W) x 403 mm (D) 8.96 " (H) x 4.92 " (W) x 15.87 " (D)

Diagonal Field of View, 2000x

190 µm

191 µm

Diagonal Field of View, 20x

19.05 mm 0.75"

19050 µm

Diagonal Field of View, 500 x

0.76 mm 0.03"

Diagonal Field of View, 80x

4.76 mm 0.19"

Diagonal Image Capture Range, 100x

3.81 mm 0.150"

Fine mode Measurement resolution (16M Mode)

16 million points

Focus variation Height display resolution, VK-X3100

0.1 nm

Focus variation Width repeatability 3s, VK-X3050

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 65 nm

Diagonal Field of View, 50x

7.62 mm 0.30"

Fluorescent light source

80 W metal halide lamp

Focus variation Height repeatability s

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 30 nm

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 20 nm

Focus variation Height repeatability s, VK-X3100

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 20 nm

Focus variation Height repeatability s, VK-X3050

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 30 nm

Diagonal Field of View, 140x

2.72 mm 0.11"

Diagonal Field of View, 60x

6.35 mm 0.25"

Diagonal Image Capture Range, 1500x

0.25 mm 0.0098"

Diagonal Image Capture Range, 30x

12.7 mm 0.500"

Diagonal Image Capture Range, 40x

9.53 mm 0.375"

Frame rate

30 F/S (max.)

50 F/S (max.)

15 fps for monochrome recording (up to 95 fps with binning) , 8.5 fps for color recording

Focus variation Width display resolution, VK-X3050

1 nm

Fluorescent incident illumination

Optical sectioning system

Focus variation Height accuracy

0.2+L/ 100 µm or less

Gain

0 dB, +6 dB, +12 dB, +18 dB

Manual, Preset

Horizontal Field of View, 30 x

10.16 mm 0.40"

10.2 mm 0.40"

Horizontal Field of View, 3000x

102 µm

Horizontal Image Capture Range, 80x

3.81 mm 0.150"

Image-formation optical system

Fixed image-forming lens, electronic LC filter insertion/removal mechanism

Horizontal Field of View, 0.1 x

3200 mm 126"

Horizontal Field of View, 200x

1.53 mm 0.06"

1.52 mm 0.06"

1520 µm

Horizontal Image Capture Range, 200x

1.52 mm 0.060"

Horizontal Field of View, 180x

1.69 mm 0.07"

Horizontal Field of View, 20 x

15.24 mm 0.60"

Horizontal Field of View, 500 x

0.61 mm 0.02"

Horizontal Field of View, 80x

3.81 mm 0.15"

Horizontal Image Capture Range, 1000x

3.05 mm 0.120"

0.31 mm 0.0122"

High accuracy Resolution

6144 (H) x 4608 (V)

12,000 (H) x 9000 (V)

High dynamic range

16-bit intensity range through RGB data from each pixel

High magnification Measurement range

ø70 x H 50 mm ø2.76" x H 1.97"

Horizontal Field of View, 1 x

320 mm 12.6"

Horizontal Field of View, 400x

0.76 mm 0.03"

Horizontal Field of View, 50 x

6.1 mm 0.24"

6.10 mm 0.24"

Image element

1/1.7-inch, 12.22-megapixel CMOS image sensor

Image receiving element

1/1.8 inch, 3.19 megapixel CMOS image sensor

2/3 inch, 2.83 million pixel monochrome CCD (colorized with LC filter)

High magnification (2 × 2 composition)

VL-550: ø110 x H 50 mm ø4.33" x H 1.97"

Horizontal Field of View, 200 x

1.53 mm 0.06"

1.52 mm 0.06"

Horizontal Field of View, 2000x

152 µm

150 µm

Horizontal Image Capture Range, 50x

6.10 mm 0.240"

Head Dimensions

Head: 517 (H) x 340 (W) x 496 mm (D) 20.35 " (H) x 13.39 " (W) x 19.53 " (D)

Laser confocal Height repeatability s, VK-X3050

10x: 100 nm, 20x: 40 nm, 50x: 20 nm

Load capacity

5 kg

50 kg 110.23 lb

1 kg

Load capacity VL-550

VL-550: 50 kg 110.23 lb

Load capacity, VL-550

VL-550: 50 kg 110.23 lb

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz

Horizontal Image Capture Range, 20x

15.24 mm 0.600"

Horizontal Image Capture Range, 500x

0.61 mm 0.0240"

0.61 mm 0.024"

Horizontal Field of View, 0.5 x

640 mm 25.2"

Horizontal Field of View, 150 x

2.03 mm 0.08"

Horizontal Field of View, 40x

7.62 mm 0.30"

Horizontal Field of View, 5 x

61 mm 2.40"

Horizontal Field of View, 500x

0.61 mm 0.02"

610 µm

Horizontal Image Capture Range, 100x

3.05 mm 0.120"

Horizontal Field of View, 160x

1.91 mm 0.08"

Horizontal Field of View, 20x

15.24 mm 0.60"

15240 µm

Horizontal Field of View, 60x

5.08 mm 0.20"

Horizontal Image Capture Range, 150x

2.03 mm 0.080"

Horizontal Image Capture Range, 2500x

0.12 mm 0.0047"

Horizontal Image Capture Range, 4000x

0.08 mm 0.0031"

Horizontal Image Capture Range, 400x

0.76 mm 0.030"

Horizontal Image Capture Range, 40x

7.62 mm 0.300"

High-resolution

2880 (H) x 2160 (V) (4K Mode OFF), 4000 (H) x 3000 (V) (4K Mode ON)

Horizontal Field of View, 10 x

30.5 mm 1.20"

Horizontal Field of View, 1000x

300 µm

305 µm

Horizontal Field of View, 100x

3.05 mm 0.12"

3050 µm

Horizontal Field of View, 140x

2.18 mm 0.09"

Horizontal Field of View, 300 x

1.02 mm 0.04"

Horizontal Field of View, 300x

1.02 mm 0.04"

Horizontal Image Capture Range, 300x

1.02 mm 0.040"

High magnification (3 × 1 composition)

VL-550: W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Horizontal Field of View, 100 x

3.05 mm 0.12"

Horizontal Field of View, 5000x

61 µm

Horizontal Field of View, 50x

6.09 mm 0.24"

Horizontal Image Capture Range, 30x

10.16 mm 0.400"

Horizontal Field of View, 1000 x

0.30 mm 0.01"

Horizontal Field of View, 120x

2.54 mm 0.10"

Horizontal Field of View, 700 x

0.44 mm 0.02"

Horizontal Image Capture Range, 1500x

0.20 mm 0.0079"

Horizontal Image Capture Range, 2000x

0.16 mm 0.0063"

Horizontal Image Capture Range, 5000x

0.06 mm 0.0024"

Horizontal Image Capture Range, 700x

0.44 mm 0.0173"

Horizontal Image Capture Range, 6000x

0.05 mm 0.0020"

Laser class

Class 2 (IEC60825-1, FDA (CDRH) Part 1040.10)

Laser confocal Height display resolution

1 nm

0.1 nm

Laser confocal Height repeatability s

10x: 100 nm, 20x: 40 nm, 50x: 12 nm

10x: 100 nm, 20x: 40 nm, 50x: 20 nm

Laser confocal Width accuracy

Measured value ±2% or less

Laser confocal Width display resolution

1 nm

0.1 nm

Magnification

20 x, 30 x, 50 x, 100 x, 150 x, 200 x

2500x, 4000x, 5000x, 6000x

20 x, 100 x, 200 x, 500 x, 1000 x, 2000 x

100 x, 200 x, 300 x, 500 x, 700 x, 1000 x

20x, 30x, 40x, 50x, 80x, 100x

500 x, 1000 x, 2000 x, 3000 x, 5000 x

100x, 150x, 200x, 300x, 400x, 500x

500x, 700x, 1000x, 1500x, 2000x, 2500x

0.1 x, 0.5 x, 1 x, 5 x, 10 x, 30 x, 50 x

20 x, 40 x, 60 x, 80 x, 100 x, 120 x, 140 x, 160 x, 180 x, 200 x

50 x, 100 x, 200 x, 300 x, 400 x, 500 x

Manual operation range

70 x 70 mm 2.76” x 2.76”

Max. laser output

0.9 mW

Laser confocal Height repeatability s, VK-X3100

10x: 100 nm, 20x: 40 nm, 50x: 12 nm

Laser confocal Width repeatability 3s, VK-X3050

10x: 400 nm, 20x: 100 nm, 50x: 50 nm

Low magnification Measurement range

ø300 x H 200 mm ø11.81" x H 7.87"

Measurement resolution Fine mode (16M Mode)

VL-550: 16 million points

Laser confocal Width repeatability 3s

10x: 200 nm, 20x: 100 nm, 50x: 40 nm

10x: 400 nm, 20x: 100 nm, 50x: 50 nm

Laser wavelength

Semiconductor laser, 661 nm

Semiconductor laser, 404 nm

Laser wavelength, VK-X3050

Semiconductor laser, 661 nm

Measurement range Low magnification

ø300 x H 200 mm ø11.81" x H 7.87"

Laser confocal Width repeatability 3s, VK-X3100

10x: 200 nm, 20x: 100 nm, 50x: 40 nm

Laser confocal Width display resolution, VK-X3050

1 nm

Laser confocal Height display resolution, VK-X3100

0.1 nm

Light blocking curtain Weight

5.5 kg 12.13 lb (VL-550), 3.6 kg 7.94 lb (VL-530)

5.5 kg 12.13 lb

Minimum view range

2.2 mm 0.09"

2.4 mm 0.09"

2 mm 0.08"

Maximum observation magnification

150x

135x

125x

Laser light-receiving element

16-bit photomultiplier

Laser wavelength, VK-X3100

Semiconductor laser, 404 nm

Laser confocal Width display resolution, VK-X3100

0.1 nm

Measurement light source

Blue LED

Load capacity, VL-530

VL-530: 20 kg 44.09 lb

Measurement resolution Standard mode (4M Mode)

4 million points

Measurement Unit Weight

18.5 kg 40.79 lb

0.13

0.45

0.3

0.1

Laser confocal Height accuracy

0.2+L/ 100 µm or less

Observation light source

LEDs in 3 colors (red, green, blue)

Observation software

Multi-color image capturing, Auto focus, Quick full-focusing, Scale display, Electronic revolver control, Electronic stage control

Optical observation; Number of pixels

5.6 million

Optical receiver system

Low/high magnification offset dual optical module

Outer diameter When the Lateral view tube is installed

ø10.5 mm 0.413"

ø5.9 mm 0.232"

ø3.0 mm 0.118"

Measurement unit

VL-570

Overvoltage category

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Observation distance

1 mm 0.0394"

24 mm 0.945"

30 mm 1.181" (22.9 mm 0.902")

6.3 mm 0.2480"

Low magnification (3 × 1 composition)

VL-550: W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

Power consumption

30 VA

Controller/Measurement unit: 200 VA

130 VA

18 VA

150 VA

250 VA

Power consumption, VL-550

VL-550: Controller/Measurement unit: 200 VA, Stage: 80 VA

Power voltage

DC 12 V

100 to 240 VAC ±10%, 50/60 Hz

12V DC 2.5 A

100 to 240 VAC, 50/60 Hz

Laser confocal Height display resolution, VK-X3050

1 nm

Motorized filter turret

Up to four filters can be mounted. Automatic position recognition and automatic excitation shutdown during filter replacement

Oil & waterproof

Machine oil and light oil

Motorized Z stage

8 mm 0.31 " stroke, minimum 0.1 µm pitch min.

Load capacity VL-530

VL-530: 20 kg 44.09 lb

Low magnification (2 × 2 composition)

VL-550: ø500 x H 200 mm ø19.69" x H 7.87"

Measurement accuracy

±10 µm 0.0004"

Observation depth

VH-F61 : 10 mm to 80.39" to 8 , VH-F111 : 20 mm to 80.79" to 8

Optical zoom

1 to 8x

Outer diameter When the borescope lens alone/With the Guard tube installed

ø10.0 mm ø0.39"

ø2.7 (ø3.0) mm ø0.11" (ø0.12")

ø5.5 mm ø0.22"

Observation modes

Brightfield, Fluorescence (wide-field/sectioning) , Phase contrast (PhL, Ph1, Ph2) , Oblique illumination

Optical observation; Ring illumination lens

2.5x, 5x, 10x

Stage configuration, VL-550

VL-550: Motorized XY theta stage mechanism

Motorized XY theta stage mechanism

Stage rotation

360 Degrees (infinite rotation)

Standard Resolution

2048 (H) x 1536 (V)

2880 (H) x 2160 (V)

Power consumption VL-530: Controller/Measurement unit:

200 VA, Stage: 200 VA

Number of pixels in recorded image

4,080 x 3,060 max (12.5 megapixel, high-quality interpolation)

Pollution degree

Power consumption VL-550: Controller/Measurement unit:

200 VA, Stage: 80 VA

Power supply

100 to 240 VAC ±10 %, 50/60 Hz

Relative humidity

35 to 80% RH (no condensation)

35 to 80 % RH (No condensation)

20 to 80% RH (no condensation)

Measurement range High magnification

ø70 x H 50 mm ø2.76" x H 1.97"

Side camera

Yes, VGA

Motorized operation range

100 x 100 mm 3.94” x 3.94”

Motorized XY stage

114 x 80 mm 4.49 " x 3.15 " stroke, minimum 1 µm pitch min.

Type

Measurement unit

Variable illumination adapter

Z stage

Controller

Tilt stage

Borescope lens

Lens attachment

Diffuse Illumination Adapter

Measurement head

Real bore zoom attachment

Stage

Vertical Field of View, 100 x

2.28 mm 0.09"

Vertical Field of View, 160x

1.43 mm 0.06"

Vertical Field of View, 500 x

0.46 mm 0.02"

Vertical Image Capture Range, 1000x

0.23 mm 0.0091"

2.28 mm 0.090"

Vertical Image Capture Range, 200x

1.14 mm 0.045"

Vertical Image Capture Range, 4000x

0.06 mm 0.0024"

View direction

VH-F61 : Direct view , VH-F111 : Direct view

8.5 mm

7.5 to 8.8 mm

14.5 mm

16.5 mm

White balance

Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K)

Push-set, manual

PC interface

USB2.0

XY stage configuration; Motorized operation range

100 x 100 mm 3.94” x 3.94”

XY-stage movement range

±50 mm ±1.97"

X: ±37.5 mm ±1.48", Y: ±25 mm ±0.98"

±20 mm ±0.79"

XY? stage size

Top surface: 171 x 168 mm 6.73" x 6.61" (center disk: ø100 ø3.94")

Top surface: 233 x 185 mm 9.17" x 7.28" (center disk: ø168 ø6.61")

Top surface: 180 x 136 mm 7.09" x 5.35"

Z stage: Motorized/Manual

Manual

Motorized

Motorized: Operating range

100 x 100 mm 3.94” x 3.94”

Objective lens switching

Six-mount electronic revolver

Operating atmospheric pressure

1 atm

Revolver

6-hole electric revolver

Output signal, gradations

14-bit/8-bit monochrome, 8-bit R/G/B

Power consumption, VL-530

VL-530: Controller/Measurement unit: 200 VA, Stage: 200 VA

Stage Weight

26 kg 57.32 lb (VL-550), 25.4 kg 56.00 lb (VL-530)

26 kg 57.32 lb

Standard mode Measurement resolution (4M Mode)

4 million points

Number of pixels

5.6 million

Objective lenses

Nikon CFI60 Series infinite optical system

Supported lenses

VH-B18, VH-B27, VH-B40, VH-B55, VH-B100

Optical transmitter system

Offset transmission-type projector module

Optical observation; Optical zoom

1 to 8x

Optical observation; Revolver

6-hole electric revolver

Spectral interference film thickness measurement Accuracy

±0.6%

Stage configuration

Motorized XY theta stage mechanism

Supercharge shutter

Can be set in 0.01 s increments from 0.03 to 4 s

Can be set in 0.01 s increments from 0.02 to 16 s

Repeatability (s)

2 µm 0.000079"

Scanning system

Progressive

Slide thickness

1.2

0 to 2

Transmitted light source

3.7 W LED

Vertical Field of View, 1000x

230 µm

229 µm

Vertical Image Capture Range, 2000x

0.11 mm 0.0043"

Vertical Image Capture Range, 30x

7.6 mm 0.299"

Ring illumination lens

2.5x, 5x, 10x

Stage configuration, VL-530

Motorized theta stage mechanism

VL-530: Motorized theta stage mechanism

XY motorized stage movement speed

10 mm 0.39"/sec (max)

20 mm 0.79"/sec (max)

Z-stage movement range

28 mm 1.10"

47 mm 1.85"

Specimen enclosure

The stage is fully contained in a built-in darkroom

Stage movement range

ø200 mm ø7.87"

VL-550: ø200 mm ø7.87"

Stage Power Supply

80 VA

Standard mode (4M Mode) Measurement resolution

4 million points

Transmitted illumination mechanism

Electronic brightfield aperture (0 %, 20 %, 40 %, 60 %, 80 %, 100 %) /Phase contrast slit (PhL, Ph1, Ph2)

Stage

VL-550,VL-530

Spectral interference film thickness measurement Repeatability s

0.1 nm

Vertical Field of View, 100x

2.28 mm 0.09"

2280 µm

Vertical Field of View, 700 x

0.33 mm 0.01"

Weight

Approx. 12 kg

Head: 33 kg, Controller: 4.8 kg

23.8 kg

Approx. 14.2 kg

25.3 kg

Approx. 13 kg

Approx. 3 kg

Approx. 19.5 kg

Approx. 3.5 kg

Vertical Field of View, 1 x

240 mm 9.45"

Vertical Field of View, 5 x

45.5 mm 1.79"

Vertical Field of View, 5000x

46 µm

Vertical Field of View, 500x

457 µm

460 µm

0.46 mm 0.02"

Vertical Image Capture Range, 500x

0.46 mm 0.018"

0.46 mm 0.0181"

Vertical Image Capture Range, 50x

4.56 mm 0.180"

White light interferometry Width display resolution

0.1 nm

Working distance

5 mm 0.20" or more

3 mm 0.12" or more

20 x, 40 x, 60 x, 80 x, 100 x, 120 x, 140 x, 160 x, 180 x, 200 x: 20.8 mm 0.82"

85.0 mm 3.35"

100 x, 200 x, 300 x, 500 x, 700 x, 1000 x:25 mm 0.98" (20 mm 0.79")

4.4 mm 0.17"

20 x, 30 x, 50 x, 100 x, 150 x, 200 x: 25.5 mm 1"

15 mm 0.59"

XY stage: Motorized/Manual

Manual

Motorized

Vertical Field of View, 2000x

114 µm

110 µm

Vertical Field of View, 20x

11400 µm

11.40 mm 0.45"

Vertical Field of View, 30 x

7.6 mm 0.30"

7.60 mm 0.30"

Vertical Field of View, 300 x

0.76 mm 0.03"

Vertical Field of View, 300x

0.76 mm 0.03"

Vertical Field of View, 400x

0.57 mm 0.02"

Vertical Field of View, 60x

3.08 mm 0.12"

Vertical Image Capture Range, 5000x

0.05 mm 0.0020"

Working distance, 5 x, 10 x, 30 x, 50 x

95 mm 3.74"

Z motorized stage motor

5-phase stepper motor

2-phase stepper motor

5-phase stepping motor

Z motorized stage movement speed

17 mm 0.67"/sec (max)

White light interferometry Height display resolution

0.01 nm

Vertical Image Capture Range, 6000x

0.04 mm 0.0016"

View angle

32 Degrees

VH-F61 : 65 Degrees, VH-F111 : 55 Degrees

35 Degrees

XY stage configuration; Manual operation range

70 x 70 mm 2.76” x 2.76”

XY motorized stage motor

2-phase stepping motor

XY motorized stage resolution

1 µm (typical)

Z motorized stage resolution

0.1 µm (typ.)

0.1 µm (typical)

1 µm (typical)

Z motorized stage travel speed

5 mm 0.19" /sec (max)

17 mm 0.67" /sec (max)

Z stage Focus Axis: Motorized/Manual

Motorized

Tilt mechanism

Up to 45 Degrees

Total Pixels

Total pixels: 2064 (H) x 1554 (V); virtual pixels: 2048 (H) x 1536 (V)

4168 (H) x 3062 (V); virtual pixels: 4024 (H) x 3036 (V)

Vertical Field of View, 10 x

22.8 mm 0.80"

Vertical Field of View, 120x

1.90 mm 0.07"

Vertical Field of View, 80x

2.85 mm 0.11"

Vertical Image Capture Range, 20x

11.4 mm 0.449"

Vertical Image Capture Range, 80x

2.85 mm 0.112"

Video capture

75 fps for 240 x 180, 95 fps for 160 x 120

Vertical Field of View, 140x

1.63 mm 0.06"

Vertical Field of View, 20 x

11.40 mm 0.45"

Vertical Field of View, 200x

1.14 mm 0.04"

1140 µm

Vertical Field of View, 3000x

76 µm

Vertical Field of View, 40x

5.70 mm 0.22"

Vertical Image Capture Range, 300x

0.76 mm 0.030"

Vertical Image Capture Range, 40x

5.7 mm 0.224"

Vertical Image Capture Range, 700x

0.33 mm 0.0130"

Video capture 8-bit monochrome

15 fps for 1,280 x 960

Video capture Color

8.5 fps for 1,280 x 960

Vertical Field of View, 1000 x

0.23 mm 0.01"

Vertical Field of View, 150 x

1.52 mm 0.06"

Vertical Field of View, 50 x

4.56 mm 0.18"

4.6 mm 0.18"

Vertical Field of View, 50x

4.57 mm 0.18"

Vertical Image Capture Range, 1500x

0.15 mm 0.0059"

White light source

White LED

Vertical Field of View, 200 x

1.14 mm 0.04"

Vertical Image Capture Range, 100x

2.28 mm 0.090"

Video capture With binning

28 fps for 960 x 720, 40 fps for 640 x 480, 50 fps for 480 x 360

View direction When the borescope lens alone/With the Guard tube installed

0 Degrees (Direct view)

White light interferometry Surface topography repeatability

0.08 nm

Z stage travel range

49 mm 1.93"

Motorized : 29 mm 1.14" Manual : 33 mm 1.30"

Transmitted illumination optical system

Operating distance: 45 mm 1.77 ", Pop-up mechanism (with automatic lamp shut off function)

Total magnification

42 to 28800x

Transmitted lighting

20x or higher

Vertical Field of View, 180x

1.27 mm 0.05"

Vertical Image Capture Range, 2500x

0.09 mm 0.0035"

View direction When the Lateral view tube is installed

90 Degrees (Lateral view)

Vertical Field of View, 0.1 x

2400 mm 94.49"

Vertical Field of View, 0.5 x

480 mm 18.9"

Vertical Image Capture Range, 150x

1.52 mm 0.060"

Vertical Image Capture Range, 400x

0.57 mm 0.022"

White-light-receiving element

High-definition color CMOS

White light interferometry Repeatability of RMS

0.008 nm

Working distance, 0.1 x

0.1 x: Approx. 7700 mm; Approx. 1500 mm; Approx. 720 mm

Z motorized/manual stage

Motorized

Z stage movement amount

49 mm 1.93"

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