Government Scientific Source

$0~$10(0)
$10~$25(4)
$25~$50(6)
$50~$75(19)
$75~$100(12)
$100~$200(32)
$200~$300(18)
$300~$400(37)
$400~$500(7)
$500~$750(22)
$750~$1000(16)
$1000~$5000(65)
$5000~$10000(5)
$10000~$50000(9)
$50000~$100000(1)
$100000~$3000000(0)

$0~$10(0)

$10~$25(4)

$25~$50(6)

$50~$75(19)

$75~$100(12)

$100~$200(32)

$200~$300(18)

$300~$400(37)

$400~$500(7)

$500~$750(22)

$750~$1000(16)

$1000~$5000(65)

$5000~$10000(5)

$10000~$50000(9)

$50000~$100000(1)

$100000~$3000000(0)

? rotation angle

360 Degrees

Ambient temperature

0 to +40 Degrees C 32 to 104 Degrees F

+10 to +80 Degrees C 50 to 176 Degrees F

+15 to 28 Degrees C 59 to 82.4 Degrees F

+5 to 40 Degrees C +41 to 104 Degrees F

Ambient humidity range

20 to 80% RH (no condensation)

Ambient temperature range

+ 15 to + 30 Degrees C +59 to + 86 Degrees F

Applicable product

VR-3050, VR-3100

Automatic XY combined measurement range High magnification (3 × 1 composition)

W 150 x D 70 x H 50 mm W 5.91" x D 2.76" x H 1.97"

Automatic XY combined measurement range Low magnification (2 × 2 composition)

ø500 x H 200 mm ø19.69" x H 7.87"

Automatic rotation combined measurements Stitching Function

Yes

Borescope lens zoom attachment

VH-BA

Capacity

One 100 mm Petri dish

Bendable sleeve angle

VH-F61 : 120 Degrees (up and down) , VH-F111 : 120 Degrees (up and down), 100 Degrees (right and left)

Automatic XY combined measurement range Low magnification (3 × 1 composition)

W 580 x D 300 x H 200 mm W 22.83" x D 11.81" x H 7.87"

Automatic XY combined measurement range High magnification (2 × 2 composition)

ø110 x H 50 mm ø4.33" x H 1.97"

Controller Weight

3.8 kg 8.38 lb

Diagonal Field of View, 200x

1.90 mm 0.07"

Diagonal Field of View, 3000x

127 µm

Diagonal Field of View, 300x

1.27 mm 0.05"

Diagonal Field of View, 500x

762 µm

0.76 mm 0.03"

Controller

VL-500

Control PC

Dedicated PC specified by KEYENCE (OS: Windows 10)

Diagonal Field of View, 1000x

381 µm

Diagonal Field of View, 400x

0.95 mm 0.04"

Dichroic mirror wavelength

585 nm

565 nm

495 nm

400 nm

660 nm

425 nm

Excitation wavelength

360/40 nm

560/40 nm

620/60 nm

470/40 nm

395/25 nm

545/25 nm

Focus variation Width repeatability 3s, VK-X3100

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 50 nm

Diagonal Field of View, 100x

3.81 mm 0.15"

Diagonal Field of View, 5000x

76 µm

Diagonal Field of View, 50x

7.62 mm 0.30"

Diagonal Field of View, 2000x

191 µm

Dimensions

VH-F61 : ø6.1 mm0.24",VH-F111 : ø11 mm 0.433"

Focus variation Height repeatability s, VK-X3050

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 30 nm

Effective length

276 mm 10.87"

VH-F61 : 1000 mm 39.37" , VH-F111 : 1500 mm 59.06"

185.3 mm 7.30"

Emission wavelength

700/75 nm

525/50 nm

460/50 nm

605/70 nm

630/75 nm

Field of view

11 to 7398 µm

Focus variation Width display resolution, VK-X3100

0.1 nm

Focus variation Height repeatability s, VK-X3100

5x: 500 nm, 10x: 100 nm, 20x: 50 nm, 50x: 20 nm

Display resolution

0.1 µm 0.000004"

For Use With Equipment

EVOS® Onstage Incubator, EVOS® FL Auto Imaging System

Focus variation Height accuracy

0.2+L/ 100 µm or less

Fine mode Measurement resolution (16M Mode)

16 million points

Focus variation Height display resolution, VK-X3100

0.1 nm

Focus variation Width repeatability 3s, VK-X3050

5x: 400 nm, 10x: 400 nm, 20x: 120 nm, 50x: 65 nm

Focus variation Width display resolution, VK-X3050

1 nm

Focus variation Height display resolution, VK-X3050

1 nm

Focus variation Width accuracy

Measured value ±2% or less

Horizontal Field of View, 2000x

152 µm

Horizontal Field of View, 500x

0.61 mm 0.02"

610 µm

High magnification Measurement range

ø70 x H 50 mm ø2.76" x H 1.97"

Horizontal Field of View, 400x

0.76 mm 0.03"

Horizontal Field of View, 5000x

61 µm

Horizontal Field of View, 50x

6.09 mm 0.24"

Horizontal Field of View, 200x

1.53 mm 0.06"

Horizontal Field of View, 100x

3.05 mm 0.12"

Horizontal Field of View, 300x

1.02 mm 0.04"

Horizontal Field of View, 1000x

305 µm

Horizontal Field of View, 3000x

102 µm

Laser wavelength, VK-X3050

Semiconductor laser, 661 nm

Laser class

Class 2 (IEC60825-1, FDA (CDRH) Part 1040.10)

Laser confocal Width accuracy

Measured value ±2% or less

Low magnification Measurement range

ø300 x H 200 mm ø11.81" x H 7.87"

Measurement light source

Blue LED

Laser light-receiving element

16-bit photomultiplier

Laser wavelength, VK-X3100

Semiconductor laser, 404 nm

Minimum view range

2.2 mm 0.09"

2.4 mm 0.09"

2 mm 0.08"

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Power consumption

18 VA

150 VA

130 VA

Controller/Measurement unit: 200 VA

Product Line

EVOS

Side camera

Yes, VGA

Type

Borescope lens

Lens attachment

Tilt stage

Real bore zoom attachment

Stage

Variable illumination adapter

Z stage

Vertical Field of View, 2000x

114 µm

Vertical Field of View, 300x

0.76 mm 0.03"

Vertical Field of View, 400x

0.57 mm 0.02"

White light interferometry Height display resolution

0.01 nm

XY motorized stage motor

2-phase stepping motor

XY motorized stage resolution

1 µm (typical)

Z motorized stage travel speed

5 mm 0.19" /sec (max)

17 mm 0.67" /sec (max)

Z stage Focus Axis: Motorized/Manual

Motorized

Z-stage movement range

47 mm 1.85"

28 mm 1.10"

Max. laser output

0.9 mW

Laser confocal Width display resolution, VK-X3050

1 nm

Outer diameter When the Lateral view tube is installed

ø5.9 mm 0.232"

ø10.5 mm 0.413"

ø3.0 mm 0.118"

Laser confocal Width repeatability 3s, VK-X3100

10x: 200 nm, 20x: 100 nm, 50x: 40 nm

Load capacity

50 kg 110.23 lb

5 kg

1 kg

Laser confocal Height display resolution, VK-X3050

1 nm

Outer diameter When the borescope lens alone/With the Guard tube installed

ø2.7 (ø3.0) mm ø0.11" (ø0.12")

ø5.5 mm ø0.22"

ø10.0 mm ø0.39"

Standard mode Measurement resolution (4M Mode)

4 million points

Observation light source

LEDs in 3 colors (red, green, blue)

Optical observation; Number of pixels

5.6 million

Optical receiver system

Low/high magnification offset dual optical module

Supported lenses

VH-B18, VH-B27, VH-B40, VH-B55, VH-B100

Laser confocal Height display resolution, VK-X3100

0.1 nm

Power voltage

DC 12 V

100 to 240 VAC ±10%, 50/60 Hz

100 to 240 VAC, 50/60 Hz

Magnification

500 x, 1000 x, 2000 x, 3000 x, 5000 x

50 x, 100 x, 200 x, 300 x, 400 x, 500 x

Maximum observation magnification

150x

125x

135x

Laser confocal Height repeatability s, VK-X3050

10x: 100 nm, 20x: 40 nm, 50x: 20 nm

Optical observation; Ring illumination lens

2.5x, 5x, 10x

Repeatability (s)

2 µm 0.000079"

Relative humidity

35 to 80% RH (no condensation)

20 to 80% RH (no condensation)

Laser confocal Width display resolution, VK-X3100

0.1 nm

Optical observation; Optical zoom

1 to 8x

Optical observation; Revolver

6-hole electric revolver

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz

Laser confocal Height accuracy

0.2+L/ 100 µm or less

Light blocking curtain Weight

5.5 kg 12.13 lb

Laser confocal Height repeatability s, VK-X3100

10x: 100 nm, 20x: 40 nm, 50x: 12 nm

Laser confocal Width repeatability 3s, VK-X3050

10x: 400 nm, 20x: 100 nm, 50x: 50 nm

Measurement accuracy

±10 µm 0.0004"

Measurement Unit Weight

18.5 kg 40.79 lb

Operating atmospheric pressure

1 atm

Measurement unit

VL-570

Stage Weight

26 kg 57.32 lb

Motorized: Operating range

100 x 100 mm 3.94” x 3.94”

Tilt mechanism

Up to 45 Degrees

Vertical Field of View, 1000x

229 µm

Vertical Field of View, 5000x

46 µm

Vertical Field of View, 500x

457 µm

0.46 mm 0.02"

Vertical Field of View, 200x

1.14 mm 0.04"

Vertical Field of View, 3000x

76 µm

White light interferometry Width display resolution

0.1 nm

Working distance

5 mm 0.20" or more

85.0 mm 3.35"

4.4 mm 0.17"

3 mm 0.12" or more

XY stage: Motorized/Manual

Manual

Motorized

XY-stage movement range

X: ±37.5 mm ±1.48", Y: ±25 mm ±0.98"

±50 mm ±1.97"

XY? stage size

Top surface: 180 x 136 mm 7.09" x 5.35"

Top surface: 233 x 185 mm 9.17" x 7.28" (center disk: ø168 ø6.61")

Z motorized stage resolution

0.1 µm (typical)

1 µm (typical)

Z stage: Motorized/Manual

Motorized

Manual

Observation depth

VH-F61 : 10 mm to 80.39" to 8 , VH-F111 : 20 mm to 80.79" to 8

Optical transmitter system

Offset transmission-type projector module

View direction When the borescope lens alone/With the Guard tube installed

0 Degrees (Direct view)

Weight

Approx. 14.2 kg

Approx. 12 kg

25.3 kg

Approx. 3 kg

Approx. 19.5 kg

White light interferometry Surface topography repeatability

0.08 nm

Z motorized stage motor

2-phase stepper motor

5-phase stepper motor

Z stage travel range

49 mm 1.93"

Motorized : 29 mm 1.14" Manual : 33 mm 1.30"

QUANTITY / PACK

Type

Controller

Oil & waterproof

Machine oil and light oil

Spectral interference film thickness measurement Repeatability s

0.1 nm

Vertical Field of View, 100x

2.28 mm 0.09"

View direction When the Lateral view tube is installed

90 Degrees (Lateral view)

White-light-receiving element

High-definition color CMOS

Stage movement range

ø200 mm ø7.87"

Stage Power Supply

80 VA

XY motorized stage movement speed

20 mm 0.79"/sec (max)

Stage rotation

360 Degrees (infinite rotation)

Spectral interference film thickness measurement Accuracy

±0.6%

Stage configuration

Motorized XY theta stage mechanism

Total magnification

42 to 28800x

Transmitted lighting

20x or higher

White light interferometry Repeatability of RMS

0.008 nm

Vertical Field of View, 50x

4.57 mm 0.18"

View angle

35 Degrees

VH-F61 : 65 Degrees, VH-F111 : 55 Degrees

32 Degrees

White light source

White LED

XY stage configuration; Manual operation range

70 x 70 mm 2.76” x 2.76”

View direction

VH-F61 : Direct view , VH-F111 : Direct view

XY stage configuration; Motorized operation range

100 x 100 mm 3.94” x 3.94”

If you are viewing this page as a nonregistered user, the price(s) displayed is list price. To view your customer-specific pricing, log in or become a registered user here.

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253 results

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